Helium mass-spectrometer leak detector receiver
A technology of helium mass spectrometer leak detector and receiver, applied in the field of receiver, can solve the problem of high impedance
Inactive Publication Date: 2008-11-12
KYKY TECH
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Problems solved by technology
Because the feedback resistance of the micro-current amplifier connected to the receiving pole is 10 11 Ω, the impedance is very high, the AC ripple on the suppressor and the lead will enter the receiving electrode through the distributed capacitance, forming measurement noise
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[0009] The present invention will be further described below in conjunction with accompanying drawings and examples.
[0010] figure 1 A schematic diagram of the receiver of a helium mass spectrometer leak detector. Among them: 1 is the suppression electrode, add 200-400V voltage; 2 is the shielding pole; 3 is the receiving pole; 4 is the feedback resistance of the amplifier 10 11 Ω; 5 is the micro-current amplifier, 6 is the lead-in line of the suppression pole. The suppressor electrode 1 and lead 6 are shielded 2 individually to ground.
[0011] After measurement, the noise is reduced from the original 3-4mv to less than 1mv, thereby reducing the interference of the suppressing electrode leads to the receiving pole.
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The present invention provides a receiver of a helium mass spectrometer leak detector. The receiver comprises a suppressor electrode 1, a lead wire 6, and a receiving electrode 3, wherein the suppressor electrode 1 and the lead wire 6 are isolated from the receiving electrode 3 by shaded electrodes 2 respectively. Metal materials having a higher secondary electron coefficient such as aluminum or glucinfum bronze are used for the receiving electrode 3.
Description
technical field [0001] The invention relates to a receiver of a helium mass spectrometer leak detector. Background technique [0002] The main index sensitivity of helium mass spectrometer leak detector, also known as the minimum detectable leak rate. Its measurement method is to use a helium standard leak hole Q 0 , connected to the signal strength S generated by the leak detector, assuming the noise N of the measurement system, then the sensitivity of the instrument Q=Q 0 ×N / S. S / N is called the signal-to-noise ratio. The stronger the signal produced by the same leak, the higher the sensitivity, while the noisier the measurement system, the lower the sensitivity. For this reason, the way to improve the sensitivity of the instrument is to increase the signal strength and reduce the noise. [0003] In addition to the helium ions to be detected in the leak detector, stray ions or electrons generated by the collision of residual gas in the vacuum usually enter the receive...
Claims
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IPC IPC(8): G01M3/02
Inventor 黄庆文
Owner KYKY TECH