Diamond electrode, method for producing same, and electrolytic bath
By forming multiple holes on the silicon substrate and covering them with conductive diamond, the problem of high preparation cost and easy deformation of diamond electrodes is solved, and an efficient and long-life electrode is achieved, which is suitable for the generation of high-purity ozone water.
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experiment example 1
[0094] By setting the size to 50mm 2 And a conductive silicon substrate (P-type silicon single crystal substrate) with a thickness of 3 mm is processed with a fluoronitric acid solution to form a plurality of holes arranged in a staggered manner from a single surface (having an opening diameter of 2 mm on the processed surface , holes formed in a staggered arrangement with a pitch of 3 mm) to prepare a perforated substrate. In this processing, a region other than a portion having the hole (opening portion) is resin-masked by a resist treatment generally used in a semiconductor manufacturing process. The processed surface treated with fluoronitric acid was considered Surface A, and the other surface processed such that the pores passed through the substrate towards the outer surface was considered Surface B.
[0095] Perforated substrates (No. 1-10 samples) with different hole sizes (hole diameters), taper angles, aspect ratios, and opening area ratios were prepared by changin...
experiment example 2
[0101] Figure 5The samples of the electrolytic cells shown in were prepared by using the corresponding samples Nos. 1 to 10 prepared in Experimental Example 1 as anodes and cathodes. Pure water was electrolyzed through each electrolytic cell for ozone generation experiments. Use a sulfonic acid based ion exchange membrane as the ion exchange membrane and set the current density to 1A / cm 2 status. A porous graphite plate was used as a current collector. Ozone generation efficiency was measured by the KI method. Table 2 shows the results.
[0102] Table 2
[0103]
Opening area ratio (%)
Ozone generation efficiency
(%)
1
6
6
2
3
5
3
17
14
4
10
10
5
27
16
6
16
13
7
31
20
8
40
25
9
41
4
10
50
6
...
experiment example 3
[0107] Diamond electrodes with different pore diameters, taper angles, depth-to-diameter ratios, and opening area ratios were prepared similarly to Experimental Example 1, except that the coating with conductive diamond by hot-wire CVD was performed not only from the surface B of the substrate, but also from the surface A was carried out to cover the entire surface A and surface B of the substrate and the inner wall surface of the hole with the conductive diamond (sample Nos. 11-22). Table 3 shows (on surface A) the corresponding pore diameters, taper angles, depth-to-diameter ratios, and open area ratios. The average thickness of conductive diamond on the inner wall of each sample was measured by observing slices with SEM. Table 3 also shows the results.
[0108] table 3
[0109]
[0110] Each of Sample Nos. 11-22 is a diamond electrode (that is, a diamond electrode of the present invention) comprising a conductive silicon substrate having a plurality of pores and...
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Abstract
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