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A sample positioning apparatus

A technology for sample positioning and sample application in metal processing equipment, measuring/indicating equipment, large fixed members, etc., which can solve problems such as less repeatable motion and inaccuracy

Inactive Publication Date: 2009-11-11
RENISHAW PLC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] However, it has been found that tables with spring-loaded bearings are less accurate, providing less repeatable motion, than tables where all bearings are rigid

Method used

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  • A sample positioning apparatus
  • A sample positioning apparatus
  • A sample positioning apparatus

Examples

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Embodiment Construction

[0078] now refer to figure 1 and 2 , shows an optical detection device 2 comprising a sample positioning stage 4 (hereinafter referred to as stage 4 ) and an optical detection device in the form of a microscope 6 .

[0079] The microscope 6 includes an objective lens 10 , a first eyepiece 12 and a second eyepiece 14 , and an arm 16 supporting the sample positioning stage 4 .

[0080] It should be understood that the optical inspection device does not have to be a microscope, it can be any device suitable for inspection placed on stage 4 . For example, the detection means may be a spectroscope. Furthermore, it should be understood that there may be no optical detection means at all. For example, stage 4 may be used to support a sample 8 to be examined visually.

[0081] refer to figure 2 -5, the table includes a board 18 , a first bracket 20 and a second bracket 22 . It should be understood that sample positioning stage 4 is illustratively configured such that plate 18 i...

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Abstract

A sample positioning stage (4) for positioning a sample (8) to be inspected relative to an optical inspection device (2). The stage comprises a first generally planar body (18) on which a sample to be inspected can be carried and a second body (20) directly coupled to the first body via at least rigid bearing (43,45) and at least one flexible bearing (47) extending between them which constrain movement of the first body relative to the second body to a first plane that is substantially parallel to the plane of the first body. There is 'also provided a drive system being selectively operable in a first mode and a second mode in which the drive system provides less resistance to the relative movement of the first and second bodies in the plane by an external force exerted on the first body than in the first mode, the drive system being engaged in both the first and second modes. The stage further comprises a selector operable to change the mode of operation from the first mode to the second mode.

Description

technical field [0001] The present invention relates to a sample positioning stage, such as a stage for positioning a sample for inspection by optical detection equipment, such as a microscope or spectroscope. Background technique [0002] Sample positioning stages can be employed, for example, to position samples relative to microscopes and beamsplitters, and these positioning stages can include plates on which samples to be examined are placed. The substantially planar plate is typically mounted on at least one carriage such that the plate can move relative to the carriage in at least one substantially horizontal degree of freedom. The plate and bracket typically have cooperating support members such that the plate and bracket can move relative to each other in at least one degree of freedom under the control of the powered drive mechanism. A plate or carriage can be connected to another carriage by bearings, which facilitate movement of the plate in another degree of fre...

Claims

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Application Information

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IPC IPC(8): G02B21/26B23Q1/56B23Q17/22
Inventor 维克托·戈登·斯廷普森布赖恩·约翰·爱德华·史密斯安德鲁·马克·伍尔弗雷迈克尔·杰克逊·希尔
Owner RENISHAW PLC
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