Support and alignment method for inhibiting large mirror astigmatic deformation

Abstract

The invention relates to a support and alignment method for inhibiting large mirror astigmatic deformation, which comprises the following steps: firstly measuring the wavefront distortion of an optical system containing a large mirror or the surface contour of the large mirror to obtain the direction and the size of astigmatic deformation through data fitting; adjusting by a crisscross or an approximately crisscross support and adjustment method, and then measuring the wavefront distortion or the surface contour to obtain the direction and the size of the adjusted astigmatic deformation through data fitting; if the wavefront distortion is reduced or the surface contour is more approximate to a design result, readjusting along a previous adjusting direction; if the wavefront distortion is enlarged or the surface contour is deviated from the design result, readjusting along the direction opposite to the previous adjusting direction; and repeating the adjustment and measurement until design requirements are satisfied. The invention solves the technical problems of complicated support and adjustment, difficult deformation error correction, larger analytical data amount, higher analysis difficulty, slow adjustment process and low adjustment accuracy. The invention has lower design requirements for the assembled structure of the large mirror and can be conveniently realized.

Description

technical field [0001] The invention relates to a support installation and adjustment method for suppressing deformation of a large mirror surface, in particular to a "cross"-shaped or approximately "cross"-shaped support installation and adjustment method for suppressing astigmatic deformation of a large mirror surface. Background technique [0002] In optical assembly engineering, the astigmatic deformation of large mirrors is often a difficult problem. For the deformation of the large mirror surface, the existing adjustment methods mainly include the following three methods: [0003] One is the method of completely releasing stress. That is, by reducing the effect of external force on the elastic body of the mirror blank, the large mirror surface will eventually return to the ideal surface shape that is almost free from external force. It is difficult to achieve the ideal surface shape that is almost free from external force when this method is implemented. The adjustme...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a support installation and adjustment method that suppresses the astigmatic deformation of large mirror surfaces, which solves the problems of complex support and adjustment measures in the background technology, difficulty in correcting deformation errors, large amount and difficulty in analyzing data, and slow adjustment process. Technical problem of low adjustment accuracy

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