Preparation method of high-selectivity absorbing coating of solar vacuum tube

An absorbing coating and high-selectivity technology, which is applied in the field of preparation of selective absorbing coatings for solar vacuum tubes, can solve the problems of limited use, high cost of gold and silver, and shortage of gold and silver, and achieve sputtering rate improvement, low and low temperature emissivity, The effect of low heat loss

Inactive Publication Date: 2010-10-06
SHANDONG SHUAIKE NEW ENERGY
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Problems solved by technology

The bottom metal copper layer has excellent infrared reflection ability, but it is not as good as gold and silver, and the high cost of gold and silver limits its use

Method used

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  • Preparation method of high-selectivity absorbing coating of solar vacuum tube
  • Preparation method of high-selectivity absorbing coating of solar vacuum tube

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Embodiment Construction

[0018] The method of the present invention is described in detail below with reference to the accompanying drawings.

[0019] The preparation method of the solar vacuum tube highly selective absorption coating of the present invention requires a three-target magnetron sputtering coating machine, three magnetron sputtering cylindrical targets of titanium, stainless steel and aluminum, two sputtering power supplies, one set Composed of high vacuum system and planetary turret system. During the preparation of the film layer, the workpiece is installed on the turret, and the workpiece rotates while revolving. The automatic program controls the operation of the sputtering coating process, and the workpiece is taken out after the process is completed.

[0020] The preparation process is as follows:

[0021] The preparation method of the film belongs to the magnetron reactive sputtering method, the sputtering gas is argon, the reaction gas is high-purity nitrogen and carbon tetraflu...

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Abstract

The invention provides a preparation method of a high-selectivity absorbing coating of a solar vacuum tube, which adopts a magnetron reactive sputtering method, wherein the sputtering gas is argon, the reactant gas is highly pure nitrogen and carbon tetrafluoride gas, and the used equipment is a three-target magnetron sputtering film coating machine. The preparation method comprises the following steps: firstly, depositing a titanium nitride TiN infrared reflecting film by magnetron reactive sputtering on the outer wall of the inner tube of a glass tube; then depositing an aluminum nitride-stainless steel (AlN-SS) composite absorbing film; finally depositing an aluminum-carbon-fluorine (Al-C-F) composite protecting film to form a Glass/TiN/AlN-SS/AL-C-F selective absorbing coating.

Description

Technical field [0001] The present invention involves a preparation method of solar vacuum tube. Specifically, it is a preparation method for selecting coating with a solar vacuum tube with titanium nitrofae as a bottom metal layer. Background technique [0002] At present, the structure of the three-target magnetic sputtering film system is composed of the bottom metal copper layer, the ALN-SS absorption layer, and the ALN reduction.The bottom metal copper layer has excellent infrared reflection capacity, but it is not as good as gold and silver, and the high cost of gold and silver has limited it.At the same time, ALN's lower sputtering rate affects production efficiency. Therefore, it is necessary to further improve the performance and production efficiency of the membrane. It is necessary to develop a more cost -effective membrane material. Invention content [0003] The purpose of the present invention is to provide a preparation method for selecting coating with a solar va...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03C17/34
Inventor 安百军安百盈张振涛刘建
Owner SHANDONG SHUAIKE NEW ENERGY
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