Medium-temperature solar thermal collector panel
A technology of solar heat collectors and heat collecting plates, applied in the field of solar heat collectors
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[0016] The heat collecting plate of the medium temperature solar heat collector of the present invention comprises a stainless steel base plate, on which a layer of nickel nitride anti-infrared reflection film, nickel oxynitride gradient absorbing film and nickel oxide anti-reflection film are sequentially arranged.
[0017] The preparation process is as follows:
[0018] Sputtering deposition of nickel nitride anti-infrared reflection film on stainless steel substrate, working pressure 0.2-1.5 Pa, reaction gas nitrogen volume 20-200Sccm; sputtering nickel oxynitride gradient absorbing film on anti-infrared reflection film, working pressure 0.2-0.8 Pa, reaction gas nitrogen and oxygen, nitrogen and oxygen volume ratio 1:1~1:10, gas volume 60-150Sccm; nickel oxide anti-reflection film is sputter deposited on nickel oxynitride gradient absorbing film, working pressure 0.2-0.8Pa, The amount of oxygen in the reaction gas is 30-200Sccm.
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