Trough type solar medium-high-temperature heat collecting tube coating
A medium and high temperature collector tube, trough solar technology, applied in solar thermal power generation, solar thermal devices, coatings, etc.
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[0016] The preparation process is as follows:
[0017] Sputtering deposition of niobium anti-infrared reflection film on stainless steel substrate, working pressure 0.2-1.5 Pa; sputtering aluminum oxynitride silicon absorption film on anti-infrared reflection film, working pressure 0.2-0.8Pa, reaction gas nitrogen and oxygen, nitrogen and oxygen The volume ratio is 1:1~1:10, the sputtering ratio of silicon and aluminum is: 1:1~1:10, the gas volume is 100-200Sccm; the aluminum oxide anti-reflection film is deposited on the aluminum oxynitride silicon gradient absorption film by sputtering , the working pressure is 0.2-0.8Pa, and the oxygen content of the reaction gas is 30-200Sccm.
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