Trough-type solar medium-temperature and high-temperature collector tube
A trough solar energy and heat collector technology, applied in the field of solar heat collectors
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[0015] The heat collecting tube of the trough type solar medium and high temperature heat collector of the present invention comprises a stainless steel substrate, on which a layer of niobium anti-infrared reflection film, titanium nitrogen oxide gradient absorption film and titanium dioxide anti-reflection film are sequentially arranged.
[0016] The preparation process is as follows:
[0017] Sputtering deposition of niobium anti-infrared reflection film on stainless steel substrate, working pressure 0.2-1.5 Pa; sputtering titanium oxynitride gradient absorbing film on anti-infrared reflection film, working pressure 0.2-0.8Pa, reaction gas nitrogen, nitrogen and oxygen volume ratio 1:1~1:10, the gas volume is 60-150Sccm; the titanium dioxide anti-reflection film is sputter deposited on the titanium oxynitride gradient absorbing film, the working pressure is 0.2-0.8Pa, and the oxygen volume of the reaction gas is 30-200Sccm.
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