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Preparation method of high-selectivity absorbing coating of solar vacuum tube

An absorbing coating and high-selectivity technology, which is applied in the field of preparation of selective absorbing coatings for solar vacuum tubes, can solve the problems of high cost, limited use, and shortage of gold and silver, and achieve sputtering rate improvement, low-temperature emissivity, The effect of low heat loss

Inactive Publication Date: 2012-07-04
SHANDONG SHUAIKE NEW ENERGY
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Problems solved by technology

The bottom metal copper layer has excellent infrared reflection ability, but it is not as good as gold and silver, and the high cost of gold and silver limits its use

Method used

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  • Preparation method of high-selectivity absorbing coating of solar vacuum tube
  • Preparation method of high-selectivity absorbing coating of solar vacuum tube

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Embodiment Construction

[0020] The preparation method of the film belongs to the magnetron reactive sputtering method, the sputtering gas is argon, the reaction gas is high-purity nitrogen and carbon tetrafluoride gas, and the film is divided into four sputtering layers with several transition layers in between.

[0021] Anti-infrared reflection coating 1, sputtering of titanium nitride TiN

[0022] Working pressure 0.2-0.5Pa, reaction gas nitrogen, nitrogen volume 20-200Sccm, sputtering thickness 0.04-0.3μm;

[0023] Sputtering of the first composite absorber film 2, aluminum nitride-stainless steel AlN-SS

[0024] Working pressure 0.2-0.8Pa, reaction gas nitrogen, nitrogen volume 60-150Sccm, steel target current 20-40A, sputtering thickness 0.04-0.1μm

[0025] The second composite absorber film 3, sputtering of aluminum nitride-stainless steel AlN-SS

[0026] Working pressure 0.2-0.8Pa, reaction gas nitrogen, nitrogen volume 60-150Sccm, steel target current 8-20A, sputtering thickness 0.04-0.15μm...

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Abstract

The invention provides a preparation method of a high-selectivity absorbing coating of a solar vacuum tube, which adopts a magnetron reactive sputtering method, wherein the sputtering gas is argon, the reactant gas is highly pure nitrogen and carbon tetrafluoride gas, and the used equipment is a three-target magnetron sputtering film coating machine. The preparation method comprises the followingsteps: firstly, depositing a titanium nitride TiN infrared reflecting film by magnetron reactive sputtering on the outer wall of the inner tube of a glass tube; then depositing an aluminum nitride-stainless steel (AlN-SS) composite absorbing film; finally depositing an aluminum-carbon-fluorine (Al-C-F) composite protecting film to form a Glass / TiN / AlN-SS / AL-C-F selective absorbing coating.

Description

technical field [0001] The invention relates to a method for preparing a solar vacuum tube, in particular to a method for preparing a selective absorption coating for a solar vacuum tube using titanium nitride as the bottom metal layer. Background technique [0002] At present, the known three-target magnetron sputtering film structure is composed of a bottom metal copper layer, an AlN-SS absorption layer, and an AlN antireflection layer. The bottom metal copper layer has excellent infrared reflection ability, but it is not as good as gold and silver, and the high cost of gold and silver limits its use. At the same time, the lower sputtering rate of AlN affects the production efficiency, so in order to further improve the performance and production efficiency of the film system, it is necessary to develop a film system material with higher cost performance. Contents of the invention [0003] The object of the present invention is to provide a preparation method of a solar...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C03C17/34
Inventor 安百军安百盈张振涛刘建
Owner SHANDONG SHUAIKE NEW ENERGY
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