Thermal collection tube of intermediate-and-low temperature solar thermal collector
A technology of solar heat collectors and heat collecting tubes, applied in the field of solar heat collectors
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[0015] The heat collection tube of the medium and high temperature solar heat collector of the present invention includes a stainless steel substrate, on which a layer of molybdenum anti-infrared reflection film, aluminum oxynitride gradient absorption film and silicon dioxide anti-reflection film are sequentially arranged.
[0016] The preparation process is as follows:
[0017] Sputtering deposited molybdenum anti-infrared reflective film on stainless steel substrate, working pressure 0.2-1.5 Pa; sputtering oxynitride gradient absorption film on anti-infrared reflective film, working pressure 0.2-0.8Pa, reaction gas nitrogen, nitrogen to oxygen volume ratio 1:1~1:10, gas volume 60-150Sccm; sputtering deposition of silicon dioxide anti-reflection film on oxynitride gradient absorption film, working pressure 0.2-0.8Pa, reaction gas oxygen volume 30-200Sccm.
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