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Delivery unit, coating apparatus, and coating method

A coating device and discharge unit technology, applied to the surface coating liquid device, spray device, spray device, etc., can solve the problems of limited product specifications, difficulty in uniform liquid coating, and difficulty in manufacturing large-scale organic EL substrates

Active Publication Date: 2011-04-13
ARIS TECH LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Especially when there are unevenness on the object to be coated, it is difficult to apply the liquid evenly
[0006] Therefore, it is difficult to manufacture large organic EL substrates, and product specifications are limited.
[0007] In addition, it can be considered that this problem may also occur when a liquid other than the liquid containing the light-emitting layer material is applied under predetermined conditions.

Method used

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  • Delivery unit, coating apparatus, and coating method
  • Delivery unit, coating apparatus, and coating method
  • Delivery unit, coating apparatus, and coating method

Examples

Experimental program
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no. 1 approach

[0042] Coating device 900 is a device for coating by nozzle printing, such as figure 1As shown, it mainly includes a solution tank 903, a supply pipe 909, a pressurizing part 907, a first driving part 905, a flow meter 911, a nozzle (discharging part) 10, a discharging part supporting member 915, and a second driving part 913 (moving part). , the stage 919, the third drive unit 917 (moving unit), the fourth drive unit (first discharge direction changing unit, hereinafter referred to as the discharge direction changing unit) 40, and the control unit 66a. In addition, each constituent element other than the nozzle 10 of the coating apparatus 900 can be comprised by a well-known element suitably. In addition, the substrate 30 to which the solution is applied from the nozzle 10 is set on the stage 919 . Here, the outline of the structure of the substrate 30 will be described.

[0043] On the substrate 30, a plurality of pixels having organic EL elements having emission colors of...

no. 2 approach

[0113] The nozzle 11 a of the second embodiment is different from the nozzle 10 of the first embodiment in that, as shown in FIG. 13 , a discharge path 141 has a nozzle plate 15 c formed parallel to the axis of the head cylinder 12 . A device having such a nozzle plate 15c can also have a function of changing the discharge direction of the solution to a direction opposite to the advancing direction D of the nozzle 11a. The structure is described below. In addition, the same code|symbol is attached|subjected to the same structure as the structure demonstrated in 1st Embodiment below, and it does not repeat description for easy understanding.

[0114] A discharge direction changing unit 41 (second discharge direction changing unit) is provided as a device having a function of changing the discharge direction of the solution to a direction opposite to the advancing direction D of the nozzle 11a. The discharge transmission change unit 41 is composed of brackets 70, 71, two bearin...

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PUM

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Abstract

The invention provides a delivery unit, a coating apparatus, and a coating method. It is an object of the present invention to apply a liquid uniformly on a to-be-coated area of an object subjected to liquid coating. The delivery unit which delivers the liquid on the to-be-coated area of the object subjected to liquid coating comprises a main body filled with the liquid and a nozzle plate which is provided at one end side of the main body and which is provided with a delivery path for delivering the liquid. The axial line of the delivery path is inclined relative to a vertical axis toward an opposite side of a travelling direction in which the delivery unit travels relative to the to-be-coated area.

Description

technical field [0001] The present invention relates to a discharge unit for discharging fluid, a coating device, and a coating method. Background technique [0002] When manufacturing a conventional organic EL (Electro-Luminescence: electroluminescent) display device, there is a method in which a nozzle having a nozzle hole for discharging liquid is moved along the substrate in the process of forming an organic EL layer including a light-emitting layer. Simultaneously, the organic EL material (solution) is continuously discharged from the nozzle hole and applied onto the substrate, thereby forming an organic EL layer. [0003] For example, Japanese Unexamined Patent Application Publication No. 2002-75640 discloses a method for manufacturing an organic EL display device, which is characterized in that it includes the following process: forming in advance on the substrate a pattern corresponding to the predetermined pattern shape to be coated with the organic EL material. co...

Claims

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Application Information

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IPC IPC(8): B05B1/00B05C5/00B05C11/00B05B15/08B05D5/06B05B15/68
CPCB05C5/0216H01L21/6715
Inventor 海老泽功
Owner ARIS TECH LTD