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Capacitive pressure sensor with vertical electrical feedthrough and method of making the same

A pressure sensor, capacitive technology, applied in the direction of measuring fluid pressure through electromagnetic components, measuring fluid pressure, instruments, etc., can solve the pressure sensor measurement range, reliability, durability, temperature sensitivity accuracy and/or insufficient power consumption, etc. question

Active Publication Date: 2015-07-29
WUXI CONSENSIC ELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Traditional pressure sensors have deficiencies in measurement range, reliability, durability, temperature sensitivity, accuracy and / or power consumption

Method used

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  • Capacitive pressure sensor with vertical electrical feedthrough and method of making the same
  • Capacitive pressure sensor with vertical electrical feedthrough and method of making the same
  • Capacitive pressure sensor with vertical electrical feedthrough and method of making the same

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Embodiment Construction

[0013] The present invention(s) are described herein in the context of methods, systems, and apparatus for measuring pressure using a microelectromechanical system ("MEMS") capacitive pressure sensor with one or more vertical electrical feedthroughs. Exemplary embodiment.

[0014] Those of ordinary skill in the art will appreciate that the following detailed description of the exemplary embodiment(s) is illustrative only and is not intended to be limiting in any way. Other embodiments will readily appear to such skilled persons having the benefit of this disclosure. Reference will now be made in detail to implementations of the exemplary embodiment(s) as illustrated in the several drawings. The same reference numerals will be used throughout the drawings and in the following detailed description to designate the same or like parts.

[0015] In the interest of clarity, not all routine features of the implementations described herein are shown and described. Of course, it sho...

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Abstract

A sensing device capable of detecting pressure using micro-electro-mechanical system ("MEMS") capacitive pressure sensor with vertical electric feed-through is disclosed. The sensing device includes a first sensing element, a second sensing element, and a sensing circuit. In one embodiment, the first sensing element is disposed over a semiconductor die and is configured to generate a first sensing signal upon detecting pressure. The second sensing element is also disposed over the semiconductor die adjacent to the first sensing element, and is configured to generate a second sensing signal upon sensing ambient conditions. The sensing circuit is capable of generating a pressure sensing signal in response to the first sensing signal and the second sensing signal.

Description

technical field [0001] Exemplary embodiment(s) of the present invention relate to micro-electromechanical systems ("MEMS"). More specifically, the exemplary embodiment(s) of the present invention relate to MEMS sensing devices. Background technique [0002] Conventional pressure measuring devices or pressure sensors are able to measure pressure-dependent media such as gases, velocities, heights and / or liquids. Pressure is an expression of the force associated with the volumetric expansion of a fluid or gas, and is usually measured in terms of force per unit area. When a pressure sensor detects pressure, it typically generates a signal indicative of the pressure measurement. Pressure sensors have a variety of everyday applications in the fields of industrial, military, and commercial applications. [0003] Pressure sensors may alternatively be referred to as pressure transducers, pressure transmitters, pressure transmitters, velocity sensors, pressure indicators, manometer...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/14
CPCG01L19/0092G01L9/0073
Inventor S·李
Owner WUXI CONSENSIC ELECTRONICS