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Manufacturing method of a novel terahertz ultra-wide passband filter

A manufacturing method, terahertz technology, applied in the direction of waveguide devices, electrical components, circuits, etc., can solve problems such as the inability to meet military and civilian needs in large quantities, narrow resonance bandwidth, etc.

Active Publication Date: 2014-10-29
NANJING UNIV
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Problems solved by technology

However, since the mechanism of metamaterials is based on strong electromagnetic resonance, the resonance bandwidth is very narrow, which can only be applied in limited fields, and cannot meet the needs of military and civilian applications in large quantities.

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  • Manufacturing method of a novel terahertz ultra-wide passband filter
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  • Manufacturing method of a novel terahertz ultra-wide passband filter

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Embodiment Construction

[0033] Below in conjunction with accompanying drawing and specific embodiment, further illustrate the present invention, should be understood that these embodiments are only for illustrating the present invention and are not intended to limit the scope of the present invention, after having read the present invention, those skilled in the art will understand various aspects of the present invention Modifications in equivalent forms all fall within the scope defined by the appended claims of this application.

[0034] 1. Design terahertz wide passband filter

[0035] Various multilayer metamaterial structures have been investigated for the design of terahertz widepassband filter structures. But they seldom consider issues such as integration and ease of production. Based on these, we designed a simple terahertz wide-passband filter structure based on flexible substrate polyimide (polyimide). The schematic diagrams are shown in Figure 1(a) and Figure 1(b). The overall structur...

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Abstract

The invention discloses a method for manufacturing a novel terahertz ultra-wide pass band filter. The method includes cleaning a substrate, coating a polyimide film on the substrate, coating a photoresist lift off resist (LOR) on the polyimide film and drying, coating a photoresist AZ1500 on the photoresist LOR and drying, exposing the photoresist, subjecting the exposed photoresist to development and drying, vaporizing a first layer of metal on the photoresist AZ1500 and the exposed polyimide film, soaking the substrate which is subjected to vaporizing the first layer of metal in an acetone solution for lift-off, coating the polyimide film on the substrate and curing, vaporizing a second layer of metal on the photoresist AZ1500 and the exposed polyimide film, soaking the substrate which is subjected to vaporizing the second layer of metal in the acetone solution for lift-off, coating the polyimide film on the substrate and curing, removing the substrate, and lifting off the substrate and the polyimide film. The method for manufacturing the novel terahertz ultra-wide pass band filter has the advantage that the expansion of frequency bands is achieved.

Description

technical field [0001] The invention relates to a manufacturing method of a terahertz filter, in particular to a manufacturing method of a novel terahertz ultra-wide passband filter. Background technique [0002] Terahertz technology has important applications in communication, national defense, and biology. To realize the practical and effective application of terahertz waves, related functional devices such as terahertz filters are very important. With the deepening of research, in recent years, it has been proposed to use electromagnetic metamaterials, photonic crystals and other structures to realize terahertz filters. [0003] The electromagnetic properties of electromagnetic metamaterials are highly dependent on the geometric structure of the unit. People can flexibly control the electromagnetic properties only by designing resonant structural units, and they have shown great applications in functional devices such as filters and absorbers. However, since the mechanis...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01P11/00
Inventor 金飚兵梁兰菊贾小氢吴培亨
Owner NANJING UNIV
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