Dynamic loudspeaker structure with mems technology
An electrodynamic and loudspeaker technology, applied in the direction of microelectronic microstructure devices, microphones, microstructure technology, etc., can solve the problems of complexity, power limitation, output, etc.
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[0030] These drawings, especially figure 1 and 2 , shows the dynamic loudspeaker structure (reference number 1).
[0031] In general, this structure includes: stator-shaping member (reference number 2), diaphragm-shaping member (reference number 3) and elastically deformable member (reference number 4 ) for connecting all these members ).
[0032] In fact, as shown, the stator-shaping member, the diaphragm-shaping member, and the connecting member are formed in a single piece by micro-structuring / processing silicon chips (e.g., monocrystalline silicon), for example Silicon chips are based on SOI (silicon-on-insulator) technology, as shown in the figure.
[0033] Polysilicon is also contemplated.
[0034] Such as Figure 1-5 As shown in the respective drawings, the Figure 5 In fact, the connecting member (reference number 4 ) comprises connecting arms regularly distributed between the stator-shaping member 2 and the diaphragm-shaping member 3 .
[0035] For example, if ...
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