A non-conductive medium film thickness on-line detection device of a coplanar capacitive sensor
A technology of capacitive sensor and dielectric film, which is applied in electromagnetic measurement devices, electric/magnetic thickness measurement, etc., can solve the problems of small measurement thickness and human injury.
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[0031] 1. Measuring principle
[0032] The form of capacitive non-conductive medium film thickness sensor used in this project is derived from the deformation of flat capacitive structure, which is a coplanar capacitive sensor. Coplanar capacitive sensors place two measuring electrodes of a common parallel plate capacitor in the same plane in the form of concentric rings. Capacitance is formed between two effective measuring electrodes, effective electrode 1 and effective electrode 2, and the electric field lines connect the two electrode surfaces in a chrysanthemum shape, such as figure 1 shown. The measurement surface of the sensor is formed below the plane where the two active electrodes are located. When the measured plastic mold 5 was placed on the measuring surface, the dielectric constant of the working area was changed by the dielectric constant of the air to the non-conductive dielectric film. becomes air permittivity and film dielectric constant Combination,...
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