The invention discloses an MEMS inertial sensor reliability
analysis method, which comprises the following steps: step 1, failure mode and
mechanism analysis:
carding environmental factors influencing the work of an MEMS inertial sensor, identifying failure
modes caused by the environmental factors, and determining internal action mechanisms corresponding to the failure
modes; 2, selecting a representative sample, and formulating a
sample selection rule according to an application scene, a production batch, a
structure type and performance
parameter distribution of the sensor; the method has the beneficial effects that the
system carding the association relationship between various environmental factors and failure
modes, defining the internal mechanism of failure, breaking through the limitation that the existing method only pays attention to a
single factor, enabling the analysis result to be more fit with the actual working scene of the sensor, and remarkably improving the comprehensiveness of reliability analysis; representative samples are selected based on scientific
sample selection rules, key variables such as production batches, structure types and performance parameters are covered, and the problem of
insufficient sample representativeness of an existing method is solved.