The invention discloses a co-deposition layer preparation and
hydrogen isotope permeation in-situ testing device and method, and relates to the technical field of
nuclear fusion equipment detection, and the device comprises a
vacuum coating chamber which is internally provided with a transition chamber and a target position group; the target position group comprises a plurality of
sputtering target positions, and the plurality of
sputtering target positions are distributed in the circumferential direction of the same side of the sample; the
gas cylinder group gas source is used for conveying at least one
hydrogen isotope gas into the
vacuum coating chamber; the first
vacuum pump is communicated with the interior of the transition chamber through a pipeline, and the middle part of the pipeline is also connected with a
quadrupole mass spectrometer. By installing different material targets, the deposition conditions of various typical impurities near the first wall of the
Tokamak can be flexibly combined and simulated, a multi-element co-deposition layer closer to an actual service environment is formed, and an in-situ
penetration test is immediately carried out after deposition, so that sample
pollution and environmental deviation are effectively avoided, and the
test efficiency is improved. And more accurate and reliable
hydrogen isotope transportation data can be obtained.