Digital electronic shear speckle interferometer based on micro-polaroid array

Abstract

The invention disclose a digital electronic shear speckle interferometer based on a micro-polaroid array. The digital electronic shear speckle interferometer comprises a laser, a beam expander located on a light path of an outgoing beam of the laser, a to-be-detected object, a shearer located on a light path of a beam reflected from the surface of the to-be-detected object and used for obtaining two mutually perpendicular coherent linearly polarized lights, the micro-polaroid array arranged on a light path of a beam outgoing from the shearer, a photosensitive element connected with the micro-polaroid array, and processing equipment connected with the photosensitive element and used for transmitting and processing a signal acquired by the photosensitive element. The interferometer has the advantages that multiple phase shifts can be obtained by single exposure; a real-time detection effect can be achieved; a phase shift device is simplified in the light path; and as the micro-polaroid array generating the phase shifts is directly integrated onto the photosensitive element, the antivibration requirement is lowered.

Description

technical field [0001] The invention relates to an electronic shearing speckle interferometer, in particular to a digital electronic shearing speckle interferometer based on a micro-polarizer array that can obtain four phase-shifted images in real time and relates to the technical field of non-destructive and non-contact detection. Background technique [0002] The micropolarizer array is a device used to measure the light intensity of each polarization direction after the light passes through the polarizers with different transmission directions. It is usually used in conjunction with an image sensor (such as a digital camera) to obtain the The obtained images of each polarization component can be analyzed in real time. At present, the preparation methods of micropolarizer arrays mainly include polyvinyl alcohol film etching, liquid crystal material based on light-controlled alignment, and metal nano-grating. [0003] With the continuous improvement of product quality and ...

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Problems solved by technology

[0008] In order to solve the above technical problems, the object of the present invention is to propose a digital electronic shearing speckle interferometer that can obtain multiple phase shifts in one exposure based on a micropolarizer array, which solves the problem of traditional digital electronic shearing speckle The interferometer needs multiple exposures to obtain multiple phase shift images, and at the same time simplifies the device used to generate phase shift in the previous interferometer, which can realize real-time detection

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