Flexure bearing to reduce quadrature for resonating micromachined devices

A fixed part, inner part technology applied in the field of deflection bearings for reducing steering deviation for resonant microfabrication devices

Active Publication Date: 2013-11-20
QST CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Etching can cause major problems when it creates deformation in the flexure bearing, causing large undesired displacements and often driving the sensing mechanism

Method used

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  • Flexure bearing to reduce quadrature for resonating micromachined devices
  • Flexure bearing to reduce quadrature for resonating micromachined devices
  • Flexure bearing to reduce quadrature for resonating micromachined devices

Examples

Experimental program
Comparison scheme
Effect test

example 2

[0062] Example 2 includes the subject matter of Example 1, wherein the first nonlinear suspension member is C-shaped.

example 3

[0063] Example 3 includes the subject matter of Example 2, wherein the C-shape includes an inner portion connected to the anchor and extending toward the anchor bisecting plane and a central portion having a proximal portion and a distal portion, wherein the proximal A portion is connected to the inner portion, and the distal portion extends away from the anchor along the anchor bisecting plane and is connected to an outer portion extending away from the anchor bisecting plane.

example 4

[0064] Example 4 includes the subject matter of Example 3, wherein said outer portion of said first nonlinear suspension member has a proximal portion connected to said central portion of said first nonlinear suspension member, and extends away from said a distal portion of an anchor bisecting plane; a fourth portion of said first nonlinear suspension member connected at its proximal portion to said distal portion of said outer portion and extending toward said anchor to A distal portion of the fourth portion connected to a fifth portion of the first nonlinear suspension member extending toward the anchor bisecting plane.

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Abstract

An example include microelectromechanical die for sensing motion that includes a fixed portion, an anchor coupled to the fixed portion, a first nonlinear suspension member coupled to anchor on a side of the anchor, a second nonlinear suspension member coupled to the anchor on the same side of the anchor, the second nonlinear suspension member having a shape and location mirroring the first nonlinear suspension member about an anchor bisecting plane and a proof-mass that is planar, the proof mass suspended at least in part by the first nonlinear suspension member and the second nonlinear suspension member such that the proof-mass is rotable about the anchor and is slideable in a plane parallel to the fixed portion.

Description

[0001] Priority claims and related applications [0002] This application claims U.S. Provisional Patent Application Serial No. 61 / 384,247, filed September 18, 2010, entitled "LOW-QUADRATURE SUSPENSION SYSTEM FOR MULTI-AXIS GYROSCOPES" and filed September 20, 2010, entitled " IMPROVED QUADRATURE REDUCTION STRUCTURE FOR RESONATING MICROMACHINED DEVICES," the priority of U.S. Provisional Patent Application Serial No. 61 / 384,512, the entire contents of which are incorporated herein by reference. [0003] This application is related to U.S. Patent Application Serial No. 12 / 849,742, filed August 3, 2010, entitled "MICROMACHINED INERTIAL SENSOR DEVICES," and filed August 3, 2010, entitled "MICROMACHINED DEVICES AND FABRICATING THE SAME" U.S. Patent Application Serial No. 12 / 849,787 and U.S. Provisional Patent Application Serial No. 61 / 384,240, filed September 18, 2010, entitled "MICROMACHINED MONOLITHIC 6-AXIS INERTIAL SENSOR," the entire contents of which are incorporated herein by r...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5712
CPCG01C19/56G01C19/5712B81C1/00523B81B3/00B81C1/00G01C19/5621
Inventor C·阿卡约翰·加德纳·布卢姆斯伯
Owner QST CORP
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