Holographic grating exposure method adopting heterodyne interference fringe locking control

A technology of interference fringes and holographic gratings, applied in the field of spectroscopy, can solve the problems of slow response speed of linear array CCDs and poor fringe jitter suppression effect, and achieve the effect of improving the production process level, suppressing high-frequency fringe jitter, and controlling the bandwidth high.

Active Publication Date: 2014-04-02
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] In order to solve the problem in the prior art of using a linear array CCD to realize the holographic grating exposure method that the response speed of the linear array CCD is relatively slow, resulting in a poor suppression effect on the fringe jitter of a higher frequency, a method using a heterodyne method is provided. Holographic grating exposure method with interference fringe locking control

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  • Holographic grating exposure method adopting heterodyne interference fringe locking control
  • Holographic grating exposure method adopting heterodyne interference fringe locking control
  • Holographic grating exposure method adopting heterodyne interference fringe locking control

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specific Embodiment approach 1

[0022] Specific implementation mode 1. Combination Figure 2 to Figure 3 Describe this embodiment, adopt the holographic grating exposure method of heterodyne interference fringe locking control, measure the phase change of the interference fringe through the heterodyne method, adjust the frequency of a coherent beam to lock the phase of the interference fringe, and complete the holographic grating in the interference field exposure, the method is implemented by the following steps:

[0023] Step 1. Equip a set of holographic grating exposure device, including light source laser 1, first beam splitter 4, second plane mirror 5, third plane mirror 6, first beam expander 15, second beam expander 16, Interfering fields17. The light source laser passes through the first beam splitter 4, and the two light beams become the first recording light 7 and the second recording light 8 after passing through the second plane mirror 5 and the third plane mirror 6, and the two beams respectiv...

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Abstract

The invention provides a holographic grating exposure method adopting heterodyne interference fringe locking control, belonging to the field of spectrum techniques. The existing holographic grating exposure method realized by adopting a linear array CCD (Charge Coupled Device) in the prior art has the problem that high-frequency fringe jitter inhibition effect is poor due to a reason that the response speed of the linear array CCD is slow. A set of holographic grating exposure device and a set of heterodyne interference fringe locking control device are equipped. Interference fringes are locked in real time and are placed on a grating substrate for exposure. The method provided by the invention has the advantages that the interference fringes can be locked at a certain fixed value relative to the phase of the grating substrate during exposure of a holographic grating; since the control bandwidth is larger, the high-frequency fringe jitter can be better inhibited, the contrast of the groove profile of the holographic grating is guaranteed and the manufacturing process level of the holographic grating is improved.

Description

technical field [0001] The invention relates to the field of spectrum technology, in particular to a holographic grating exposure method using heterodyne interference fringe locking control. Background technique [0002] The holographic grating is an important optical component, and the exposure process of the holographic grating is one of the most important process links in the holographic grating manufacturing process. Existing holographic grating exposure devices, such as figure 1 As shown, it includes a source laser 1 , a first beam splitter 4 , a second plane mirror 5 , a third plane mirror 6 , a first beam expander 15 , a second beam expander 16 , and an interference field 17 . The light source laser passes through the first beam splitter 4, and the two light beams become the first recording light 7 and the second recording light 8 after passing through the second plane mirror 5 and the third plane mirror 6, and the two beams respectively pass through the second plane...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/32G02B5/18G03H1/12
Inventor 宋莹巴音贺希格李文昊姜珊潘明忠
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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