Method for driving capacitive load and its driving circuit
A technology for capacitive loads and drive circuits, which is applied to circuits, components of piezoelectric devices or electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, etc., can solve the problem of limited actuator control, Issues such as not providing accurate control of the rise and fall slew rates of the voltage waveform of the piezoelectric actuator
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[0034] figure 1 A schematic diagram of the drive circuit is shown. in particular, figure 1 A drive circuit 1 capable of driving a variable capacitive load 2 with a predetermined target waveform of 150V is described. The target waveform is referenced below Figure 2a , 2band 2c are described in detail. Although the target waveforms for this embodiment are relatively high voltages, any suitable voltage range may be used.
[0035] The capacitive load 2 may be a piezoelectric actuator or other such capacitive load. The capacitance of the capacitive load 2 used in this embodiment is in the range up to 2OnF, but is not limited to this range depending on the application used for the drive circuit.
[0036] The drive circuit 1 comprises an input 3 connected to a power supply 4, an output 5 connected to a capacitive load 2, an inductor 6 connected between the input 3 and the output 5, and an inductor 6 connected in parallel between the output 5 and the input 3 The transformer 7....
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