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Equipment for calibrating pyrometers

A pyrometer and equipment technology, which is applied in the directions of thermometers, radiation pyrometry, thermometer testing/calibration, etc., and can solve the problems of increasing the temperature of the black body 110 without generating convection, etc.

Inactive Publication Date: 2017-04-12
AP SYST INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] This is because the interior of the calibration device 1 is completely isolated from its exterior by a transparent barrier, and thus does not generate convection, making it difficult to rapidly increase the temperature of the blackbody 110

Method used

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  • Equipment for calibrating pyrometers
  • Equipment for calibrating pyrometers
  • Equipment for calibrating pyrometers

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Experimental program
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Embodiment Construction

[0048] Hereinafter, specific embodiments will be described in detail with reference to the accompanying drawings. This invention may, however, be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the same reference numerals refer to the same elements throughout.

[0049] Hereinafter, a temperature measuring pyrometer means a non-contact type temperature measuring device that measures temperature by measuring radiant energy, and more specifically means a device that measures temperature in a non-contact manner using low-temperature radiant energy.

[0050] image 3 is a cross-sectional view of a calibration device according to an exemplary embodiment, Figure 4 is a view illustrating an inner surface of a light output wall protection co...

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PUM

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Abstract

The present invention discloses a calibration apparatus for removing measurement biases of a pyrometer, and more particularly, an apparatus for calibrating a pyrometer whose calibration reference is used to remove the temperature measured in the pyrometer deviations in. The apparatus for calibrating a pyrometer includes a blackbody including a radiation space from which radiant energy radiates, a body housing configured to receive the blackbody therein and including a light output wall, the light an output wall having a light output port connected to the radiation space; a light output wall protective cover configured to couple with the light output wall of the body housing for defining the light output of the body housing a channel through which the wall connects to an external environment; and a securing member configured to secure the light output wall protective cover to the light output wall of the body housing.

Description

[0001] cross reference [0002] This application claims priority to Korean Patent Application No. 2013-0012766 filed on February 5, 2013 and all benefits derived from said Korean Patent Application under 35 U.S.C. §119, the contents of which are incorporated by reference in their entirety way incorporated into this article. technical field [0003] The present invention relates to a calibrating apparatus for removing measurement deviations of pyrometers, and more particularly to an apparatus for calibrating pyrometers, said apparatus calibrating reference values ​​for Deviations in temperatures measured in a non-contact manner are removed. Background technique [0004] In a heat treatment apparatus that performs a heat treatment process with respect to a substrate, heat is supplied to a silicon substrate using a heating lamp such as a halogen lamp, and the temperature of the substrate is measured by an optical probe , and feed back the measured temperature of the substrate...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J5/00
CPCG01J5/0887G01J5/0007G01J5/53G01K15/00G01J5/02
Inventor 池尙炫
Owner AP SYST INC