Laminated Radial Hybrid Compliant Actuator

Abstract

A stacked radial type hybrid compliance driver, including a stacked hybrid compliance amplification mechanism and stacked piezoelectric ceramic sheets; wherein, the stacked hybrid compliance amplification mechanism converts radial input displacement into axial output displacement , which is composed of a plurality of radiation-type parallel compliant amplification mechanisms with the same shape and structure stacked up and down and aligned, and then structurally bonded and assembled at the central axis, including a supporting frame, a deformation and displacement input part, and a flexible hinge connected to each other in sequence. Transmission branch chain and deformation displacement output part, the deformation displacement output part is located at the central axis and produces axial deformation displacement output; stacked piezoelectric ceramic sheets are fixedly clamped between the deformation displacement input part and the support frame by the clamping part of the support frame In the hollowed-out place between them, after electrification, the radial deformation displacement input is generated to the laminated hybrid compliant amplifying mechanism, and the axial displacement is output at the deformation displacement output part through the flexible hinge transmission branch chain transmission. The invention has the advantages of small size, light weight, no noise, high precision, large bearing capacity, stable dynamic and static performance, and is suitable for driving components of micro-electromechanical systems such as micro-membrane micro-pumps.

Description

technical field [0001] The invention relates to a driver suitable for a thin-film micropump and a micro vibration platform, in particular to a laminated radiation type hybrid compliant driver, which belongs to the field of micro-electromechanical systems. Background technique [0002] Utilizing the inverse piezoelectric effect of the piezoelectric material, the voltage control signal applied at both ends of the piezoelectric ceramic is converted into a mechanical deformation displacement output, which can meet the technical requirements of high-precision micro-displacement. Piezoelectric ceramics are used in vibration drivers, which are mainly realized in two forms: one is a piezoelectric chip driver, which has the characteristics of small size, large output displacement, and fast response time, but is prone to brittle fracture; the other is a piezoelectric chip driver. The electrical stack driver has the characteristics of large output force and large electrostatic capacity...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to overcome the disadvantages of traditional drivers such as large package size, difficulty in miniaturization, large high-frequency noise, and low energy efficiency, and provide a piezoelectric driver based on stacked hybrid compliant mechanism, which uses stacked piezoelectric ceramic sheets to output force The Yamato parallel compliant mechanism has the characteristics of strong bearing capacity, and the radial deformation displacement is converted into axial displacement through multi-axis flexible hinge transmission

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