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Equipment for treating exhaust gas in the foreline vacuum line

A technology of vacuum pipeline and pre-stage, applied in mechanical equipment, exhaust treatment, discharge tube, etc., can solve problems such as poor dielectric tube and corrosion

Active Publication Date: 2018-12-11
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the inventors have observed that some portions of the inner wall of the dielectric tube may develop undesirable corrosion conditions over time

Method used

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  • Equipment for treating exhaust gas in the foreline vacuum line
  • Equipment for treating exhaust gas in the foreline vacuum line

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Embodiment Construction

[0011] Devices for treating exhaust gases in forelines are provided here. Embodiments of the apparatus of the present invention may advantageously reduce, slow down, or eliminate corrosion of components (eg, dielectric or ceramic tubes) compared to conventional plasma-driven gas processing systems.

[0012] figure 1 Is a schematic illustration of a treatment system 100 suitable for use with an apparatus for treating exhaust in a backing line according to some embodiments of the present invention. The processing system 100 generally includes a processing chamber 102, a foreline 108 coupled to the processing chamber 102, and an apparatus 104 for treating exhaust gas coupled to the foreline.

[0013] The processing chamber 102 may be any processing chamber suitable for performing processing on a substrate. In some embodiments, the processing chamber 102 may be part of a processing tool, such as a cluster tool, an in-line processing tool, or the like. Non-limiting examples of s...

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Abstract

In some embodiments, an apparatus for treating exhaust gas in a foreline of a substrate processing system may include a dielectric tube configured to couple to a a foreline to allow exhaust gas to flow from the foreline through the dielectric tube; a radio frequency coil wrapped around the outer surface of the dielectric tube, the radio frequency coil having a first end to provide a radio frequency input to the radio frequency coil , the first end of the radio frequency coil is close to the first end of the dielectric tube, and the second end of the radio frequency coil is close to the second end of the dielectric tube; a tap, the tap is coupled to the radio frequency coil to provide a radio frequency return path, The tap is located between the first end of the dielectric tube and the central portion of the dielectric tube.

Description

technical field [0001] Embodiments of the invention generally relate to substrate processing equipment. Background technique [0002] Some exhaust gas treatment systems use radio frequency (RF) energy supplied to a central portion of a radio frequency coil located near the dielectric tube to facilitate ignition of the exhaust gas flowing through the dielectric tube to form a plasma. However, the inventors have observed that some portions of the inner wall of the dielectric tube may develop undesirable corrosion conditions over time. [0003] Accordingly, the present inventors provide an improved exhaust gas treatment system for treating process exhaust gases in the foreline. Contents of the invention [0004] An apparatus for treating exhaust gas in a foreline of a substrate processing system is provided herein. In some embodiments, an apparatus for treating exhaust in a foreline of a substrate processing system may include a dielectric tube configured to be coupled to t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H05H1/46H01L21/3065H01L21/205
CPCH01J37/32834H05H1/46H01J37/32844Y02C20/30F01N3/0275F01N2240/28H05H1/4652H05H2245/17H05B6/36
Inventor 迈克尔·S·考克斯科林·约翰·迪金森
Owner APPLIED MATERIALS INC