A two-degree-of-freedom flexible parallel alignment device with a remote center of rotation

A technology of alignment device and degrees of freedom, applied in manufacturing tools, program-controlled manipulators, manipulators, etc., can solve the problems of poor system dynamic performance and cumulative error of the mechanism.

Inactive Publication Date: 2016-05-11
BEIHANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This configuration is relatively simple and easy to implement, but the mechanism is prone to cumulative errors, and the dynamic performance of the system is poor

Method used

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  • A two-degree-of-freedom flexible parallel alignment device with a remote center of rotation
  • A two-degree-of-freedom flexible parallel alignment device with a remote center of rotation
  • A two-degree-of-freedom flexible parallel alignment device with a remote center of rotation

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Embodiment Construction

[0081] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0082] see figure 1 , Figure 1A , Figure 1B , Figure 1C , Figure 1DAs shown, the present invention designs a two-degree-of-freedom flexible parallel alignment device with a remote center of rotation. The two-degree-of-freedom flexible parallel alignment device includes a base 1, an outer sleeve 11, a support seat 2, a first movement Transmission mechanism 3, second motion transmission mechanism 4, third motion transmission mechanism 5, force output platform 6, first measurement component 7, second measurement component 8, third measurement component 9, first drive component 10A, second drive assembly 10B and a third drive assembly 10C.

[0083] Wherein, the structure of the first motion transmission mechanism 3, the second motion transmission mechanism 4 and the third motion transmission mechanism 5 is the same, and the first motion transmission mech...

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Abstract

The invention discloses a two-freedom-degree flexibility parallel alignment device provided with a remote rotation center. The parallel alignment device comprises a pedestal, an outer sleeve, a supporting seat, three motion transmission mechanisms, three driving assemblies and three measurement assemblies, wherein the motion transmission mechanisms and the measurement assemblies are installed on the supporting seat, the driving assemblies are installed in a countersunk head cavity of the pedestal, and the base and the outer sleeve are fixed. Parallelogram guide mechanisms, having an RCM function, of three motion branched chains are combined with a force output platform, so the two-freedom-degree flexibility parallel alignment device achieves a parallel alignment function of rotating around a remote center.

Description

technical field [0001] The invention relates to a parallel alignment device, more particularly, a two-degree-of-freedom flexible parallel alignment device with a remote rotation center. Background technique [0002] In the field of micro-nano manipulation, such as nanoimprinting, optical fiber assembly, semiconductor processing, and alignment of optical components, it is essential to achieve high-precision parallel alignment between two operating planes. Parallel alignment requires alignment equipment to be tilted in an out-of-plane direction to eliminate parallelism errors between the two operating planes. The traditional parallel alignment device is generally composed of three parallel linear motion branch chains connected to an end output platform, and the inclination adjustment of the output platform can be realized by adjusting the output displacement of the three parallel branch chains. However, since the center of rotation of the output platform is usually located in...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B25J9/00
Inventor 陈伟海屈见亮张建斌陈文杰田帅
Owner BEIHANG UNIV
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