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Recipe processing method and system

A technology of process and processing method, which is applied in the field of industrial automation manufacturing, can solve the problems of separate hardware setting and cannot meet the needs, and achieve the effect of convenient editing and viewing

Active Publication Date: 2015-10-14
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in some cases, a single recipe needs to set the tolerance value separately. If the configuration parameters of the device are changed, the value change will be applied to all recipes, that is, the hardware configuration parameter value cannot be set separately for a recipe, which cannot meet the requirements.

Method used

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  • Recipe processing method and system

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Experimental program
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Embodiment Construction

[0036] The process processing method and system provided by the embodiments of the present invention will be described below with reference to the accompanying drawings.

[0037] see figure 1 , the process processing method provided by the embodiment of the present invention includes the following steps:

[0038] S100, according to the physical storage location of each parameter in the process, divide all the parameters in the process into two types, one of which is a process parameter, and the other is a configuration parameter;

[0039] S200, after the process starts, read the values ​​of all parameters in the process;

[0040] S300, traversing all the parameters in the process, and identifying the type of the current parameter according to the name of the parameter;

[0041] S400, if the current parameter is a configuration parameter, further judge whether the current parameter has a specified value configured according to user needs, and if it is judged that the current ...

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PUM

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Abstract

The invention discloses a recipe processing method and system. The method comprises steps of grouping all parameters in a recipe into two types, namely technological parameters and configuration parameters, according to physical storage positions of the parameters in the recipe; reading values of all the parameters in the recipe after the technology begins; traversing all the parameters in the recipe and identifying the type of a current parameter according to the name of the parameter; and further determining whether or not the current parameter has an designated value configured according to user requirements if the current parameter is a configuration parameter, and if the current parameter has the designated value, sending the designated value to a corresponding functional module for operation and display. According to the invention, arrangement of the configuration parameters of some recipe can be independently carried out according to user requirements, conventional technological requirements are met, and the user is enabled to conveniently carry out edition and check.

Description

technical field [0001] The invention relates to the technical field of industrial automation manufacturing, in particular to a process processing method and system. Background technique [0002] The process recipe (Recipe) in the industrial automation manufacturing process includes multiple steps in the material processing process, the values ​​of various process parameters in each step, the end conditions of the steps, and so on. In the field of semiconductor integrated circuits, due to the higher and higher processing precision, the process has become more and more complex, and a recipe contains more and more information, which is not logically single for the craftsman The sum of information, but there are certain categories, functions, etc., which can be more convenient and reasonable to maintain and save this information and complete the process execution as required. It is very important to provide clear and concise operations for process personnel. [0003] The tradit...

Claims

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Application Information

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IPC IPC(8): G05B19/04
CPCG05B19/4184
Inventor 李娟娟
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD