A comparative anti-interference micro-movement angle mirror laser interferometer, calibration method and measurement method

Abstract

The invention relates to the field of precision test technologies and instruments, and particularly relates to a contrast type anti-interference micro-motion corner reflector laser interferometer, a calibration method and a measurement method. The contrast type anti-interference micro-motion corner reflector laser interferometer comprises a laser source, a micro-motion corner reflector, an interference measurement photoelectric detector, a movable corner reflector, a beam splitter group and a micro-motion platform, wherein the micro-motion corner reflector is arranged on the micro-motion platform. The contrast type anti-interference micro-motion corner reflector laser interferometer is characterized by further comprising a reflection measurement photoelectric detector. A laser beam is reflected to the beam splitter group by the movable corner reflector and then forms a reflected laser beam, and the reflected laser beam shots to the reflection measurement photoelectric detector. According to the laser interferometer provided by the invention, the reflection measurement photoelectric detector can measure the intensity of the laser beam reflected by the movable corner reflector, and the interference state of a laser interference beam is determined according to the intensity of the reflected laser beam, thereby realizing a purpose of resisting environmental interference.

Description

technical field

[0001] The invention relates to the field of precision testing technology and instruments, in particular to a contrasting anti-interference micro-movement angle mirror laser interferometer, a calibration method and a measurement method. Background technique

[0002] The emergence of lasers has enabled the rapid development of ancient interferometric technology. Lasers have the characteristics of high brightness, good directionality, monochromaticity and good coherence. Laser interferometry technology has been relatively mature. Laser interferometry system is widely used: measurement of precision length and angle, such as detection of linear scale, grating, gauge block, and precision screw; positioning detection system in precision instruments, such as control and correction of precision machinery; special purpose for large-scale integrated circuits Positioning detection systems in equipment and testing instruments; measurement of tiny dimensions, etc. At pre...

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