Method and device for scaling object rotation center

A technology for the center of rotation and objects, applied in the direction of measuring devices, mechanical devices, mechanical measuring devices, etc., can solve the problems of inability to accurately locate a certain point on the surface of the object, large positioning errors, etc., and achieve the effect of speeding up and reducing difficulty

Active Publication Date: 2016-03-30
RAINTREE SCI INSTR SHANGHAI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The error between its actual position and theoretical position needs to be calibrated, otherwise, it is impossible to accurately locate a point on the surface of the object, and the farther away from the center of rotation, the greater the positioning error

Method used

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  • Method and device for scaling object rotation center
  • Method and device for scaling object rotation center
  • Method and device for scaling object rotation center

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Embodiment Construction

[0029] Preferred embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although preferred embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.

[0030] The present invention firstly discloses a method for determining the center of rotation of an object, including: A: providing an object to be tested with multiple identifiable patterns, wherein the circumference corresponding to the radius of each length has at least three identifiable patterns ; B: According to the length of the radius and the coordinates of the identifiable patterns on each circumference, the center of rotation of t...

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Abstract

The invention discloses a method and device for scaling an object rotation center. The method includes the following steps of: A: providing an object to be tested having a plurality of recognizable patterns, wherein each circumference corresponding to a radius with a preset length has at least three recognizable patterns; B: determining a rotation center of the object to be tested in a stepwise improved accuracy according to the length of the radius and coordinates of the recognizable patterns on each circumference. The rotation center of the object to be tested can be scaled through a concentric circle stepwise refinement method, the difficulty of pattern searching can be reduced, and the scaling speed can be increased.

Description

technical field [0001] The invention belongs to the field of semiconductor measurement, in particular to a calibration method and device for locating the center of rotation on the surface of a rotating object. Background technique [0002] In the precision mechanical structure, such a problem is often encountered: a plane object is rotated by an angle around an axis perpendicular to its surface, and we need to find the coordinates of a point on the surface of the object before and after rotation. The projection of the axis of rotation on the surface of the object is called the center of rotation. In this type of problem, due to factors such as mechanical installation errors, the center of rotation does not absolutely coincide with a predetermined point. The error between its actual position and theoretical position needs to be calibrated, otherwise, it is impossible to accurately locate a point on the surface of the object, and the farther away from the center of rotation, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B5/004
Inventor 黄建华党江涛
Owner RAINTREE SCI INSTR SHANGHAI
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