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Calibration method and device for object rotation center

A technology for the center of rotation and objects, applied in the direction of measuring devices, mechanical devices, mechanical measuring devices, etc., can solve the problems of large positioning errors and inability to accurately locate a certain point on the surface of the object, and achieve the effect of reducing difficulty and speeding up

Active Publication Date: 2018-05-04
RAINTREE SCI INSTR SHANGHAI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The error between its actual position and theoretical position needs to be calibrated, otherwise, it is impossible to accurately locate a point on the surface of the object, and the farther away from the center of rotation, the greater the positioning error

Method used

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  • Calibration method and device for object rotation center
  • Calibration method and device for object rotation center
  • Calibration method and device for object rotation center

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Embodiment Construction

[0029] Hereinafter, preferred embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. Although the drawings show preferred embodiments of the present disclosure, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these embodiments are provided to make the present disclosure more thorough and complete, and to fully convey the scope of the present disclosure to those skilled in the art.

[0030] The present invention first discloses a method for determining the rotation center of an object, including: A: providing an object to be measured with a plurality of recognizable patterns, wherein at least three recognizable patterns are provided on the circumference corresponding to the radius of each length ; B: According to the length of the radius and the coordinates of the recognizable pattern on each circle, th...

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Abstract

The invention discloses a method for determining the center of rotation of an object, which includes the following steps: A: providing an object to be tested with a plurality of identifiable patterns, wherein there are at least three identifiable patterns on the circumference corresponding to the radius of each predetermined length. Recognition pattern; B: According to the length of the radius and the coordinates of the recognizable pattern on each circumference, the rotation center of the object to be measured is determined with gradually increasing accuracy. The invention adopts the step-by-step refinement method of concentric circles to calibrate the rotation center of the object to be measured, which reduces the difficulty of pattern search and accelerates the calibration speed.

Description

Technical field [0001] The invention belongs to the field of semiconductor measurement, and particularly relates to a calibration method and device for positioning the rotation center on the surface of a rotating object. Background technique [0002] In precision mechanical structures, we often encounter this problem: a plane object rotates an angle around an axis perpendicular to its surface, and we need to find the coordinates of a point on the surface of the object before and after the rotation. The projection of the axis of rotation on the surface of the object is called the center of rotation. In such problems, due to factors such as mechanical installation errors, the center of rotation does not absolutely coincide with a predetermined point. The error between its actual position and the theoretical position needs to be calibrated, otherwise, a certain point on the surface of the object cannot be accurately positioned, and the farther away from the center of rotation, the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B5/004
Inventor 黄建华党江涛
Owner RAINTREE SCI INSTR SHANGHAI
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