Wafer Cassette Inspection Rack
A silicon wafer box and detection frame technology, which is applied in the direction of measuring devices, mechanical measuring devices, instruments, etc., can solve the problems of detecting the deformation of silicon wafer boxes, etc., and achieve the effect of reducing defective damage and improving the yield rate of finished products
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Embodiment 1
[0029] like figure 1 , figure 2 Shown, a kind of silicon wafer box detection frame comprises:
[0030] The sliding support 4 is connected with the silicon wafer template 7 on the sliding bracket 4, and drives the silicon wafer template 7 to move up and down;
[0031] Guide column 5, the guide column 5 is inserted on the sliding bracket 4, and guides the movement of the sliding bracket 4;
[0032] It is used to connect the positioning plate 6 of the silicon wafer box 10 to be detected, the positioning plate 6 is fixed on the end of the guide column 5, and the positioning plate 6 is provided with a through hole corresponding to the position of the silicon wafer template 7 and used to pass through the silicon wafer template 7 6-1, the sliding bracket 4 slides along the guide column 5 so that the silicon wafer template 7 passes through the above-mentioned through hole 6-1 and is inserted into the silicon wafer box 10 to be tested.
[0033] Preferably, as figure 1 , figure 2...
Embodiment 2
[0041] like figure 1 , figure 2 Shown, a kind of silicon wafer box detection frame comprises:
[0042] The sliding support 4 is connected with the silicon wafer template 7 on the sliding bracket 4, and drives the silicon wafer template 7 to move up and down;
[0043] Guide column 5, the guide column 5 is inserted on the sliding bracket 4, and guides the movement of the sliding bracket 4;
[0044] It is used to connect the positioning plate 6 of the silicon wafer box 10 to be detected, the positioning plate 6 is fixed on the end of the guide column 5, and the positioning plate 6 is provided with a through hole corresponding to the position of the silicon wafer template 7 and used to pass through the silicon wafer template 7 6-1, the sliding bracket 4 slides along the guide column 5 so that the silicon wafer template 7 passes through the above-mentioned through hole 6-1 and is inserted into the silicon wafer box 10 to be tested.
[0045] Preferably, as figure 1 , figure 2...
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