Extensible passive addressing LED micro-display device
A micro-display device, an extended technology, applied in the direction of electric solid-state devices, semiconductor devices, static indicators, etc., can solve the problems of complex process of CMOS active addressing drive substrate, difficulty in preparing large-scale arrays, and high cost. Achieve the effects of cheap price, simple preparation process and guaranteed stability
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[0028] The accompanying drawings are for illustrative purposes only, and should not be construed as limitations on this patent; in order to better illustrate this embodiment, certain components in the accompanying drawings will be omitted, enlarged or reduced, and do not represent the size of the actual product; for those skilled in the art It is understandable that some well-known structures and descriptions thereof may be omitted in the drawings. The positional relationship described in the drawings is for illustrative purposes only, and should not be construed as a limitation on this patent.
[0029] Choose a blue-violet band LED epitaxial wafer with uniform growth performance, with a sapphire substrate, n-GaN layer 1, GaN-based multiple quantum well layer 2, p-GaN layer 3, and form ZnO or ITO thin film with a thickness of 200nm-500nm. Then use photoresist coating, the thickness is between 2um-3um. The pixels are formed by photolithography, ICP etching and other steps. Th...
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