Semiconductor light-emitting element and manufacturing method thereof
A technology for light-emitting elements and manufacturing methods, which can be applied to semiconductor devices, electrical components, circuits, etc., and can solve the problems of reduced light-emitting characteristics, reduced efficiency, defects and cracks, etc.
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no. 2 Embodiment approach
[0097] This embodiment mode relates to a method of manufacturing a semiconductor light emitting element.
[0098] In this manufacturing method, the first semiconductor layer 10 of the first conductivity type that is provided on the substrate 50, the third semiconductor layer 30 that is provided on the first semiconductor layer 10, and the semiconductor layer that is provided between the third semiconductor layer The surface (fourth surface 15 b ) on the first semiconductor layer 10 side of the layered body 15 of the second conductivity type second semiconductor layer 20 on the upper surface is bonded to the base 70 . The metal layer 75 is used for this bonding. That is, the implementation targets image 3 (d) Processing as described.
[0099] In this manufacturing method, after the bonding, the substrate 50 is removed. That is, the implementation targets image 3 (e) Process described (third step ST3).
[0100] In this manufacturing method, after this removal, the surface...
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