Array zeroing high precision large working distance autocollimation device and method

Abstract

The invention belongs to the fields of precision measurement technology and optical engineering, and specifically relates to an array zeroing high-precision large-working-distance auto-collimation apparatus and method. The apparatus is formed by a light source, a collimating mirror, a reflecting mirror, and a feedback imaging system. According to the method, through adjustment of the reflecting mirror, reflecting beam is returned to the mirror center of the feedback imaging system, and angle variation of the surface of a measured object is obtained by employing an angle deflection measuring device on the reflecting mirror; a conventional auto-collimation angle measuring system is additionally provided with the reflecting mirror so that the problem of measurement failure due to the deflection of reflecting light of the measured object from the measuring system can be avoided, and the auto-collimation work range is increased with the same working distance, or the working distance is increased with the same auto-collimation work range; moreover, specific designs such as the collimating mirror, the feedback imaging system and the reflecting mirror are provided so that the structure is simple and the manufacturing cost is low; the measuring precision is high especially with low sampling frequency; and the measurement is rapid.

Description

technical field

[0001] The invention belongs to the field of precision measurement technology and the field of optical engineering, and in particular relates to an array zeroing high-precision large working distance self-collimation device and method. Background technique

[0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields.

[0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundred...

Examples

specific Embodiment 1

[0081] This embodiment is an embodiment of an autocollimation device with high precision and large working distance for array zeroing.

[0082] The array zeroing high-precision large working distance self-collimation device of this embodiment, the structural diagram is as follows figure 2 shown. The self-collimation device includes a light source 1, a transmissive collimator mirror 21, a reflector 3, and a feedback imaging system 6. The reflector 3 is provided with an angle adjustment measuring device 4; After the straight mirror 21 is collimated into a parallel light beam, it is reflected by the reflector 3 and incident on the surface of the measured object 5; the light beam reflected from the surface of the measured object 5 is then reflected by the reflective mirror 3 and collected by the feedback imaging system 6 imaging;

[0083] The feedback imaging system 6 is arranged between the light source 1 and the transmissive collimator 21, including a first feedback beam spli...

specific Embodiment 2

[0086] This embodiment is an embodiment of an autocollimation device with high precision and large working distance for array zeroing.

[0087] The array zeroing high-precision large working distance self-collimation device of this embodiment, the structural diagram is as follows Figure 5 shown. On the basis of the specific embodiment 1, the array zeroing high-precision large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0088] The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflector 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected ...

specific Embodiment 3

[0090] This embodiment is an embodiment of an autocollimation device with high precision and large working distance for array zeroing.

[0091] The array zeroing high-precision large working distance self-collimation device of this embodiment, the structural diagram is as follows Figure 6 shown. On the basis of the specific embodiment 1, the array zeroing high-precision large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0092] The wavefront detection system 7 includes a wavefront detection beamsplitter 71 and a mirror deformation wavefront detector 73; the wavefront detection beamsplitter 71 is arranged between the mirror 3 and the measured object 5, and the air disturbance wavefront detection The device 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary...

technical field

[0001] The invention belongs to the field of precision measurement technology and the field of optical engineering, and in particular relates to an array zeroing high-precision large working distance self-collimation device and method. Background technique

[0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields.

[0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundred...

Examples

specific Embodiment 1

[0081] This embodiment is an embodiment of an autocollimation device with high precision and large working distance for array zeroing.

[0082] The array zeroing high-precision large working distance self-collimation device of this embodiment, the structural diagram is as follows figure 2 shown. The self-collimation device includes a light source 1, a transmissive collimator mirror 21, a reflector 3, and a feedback imaging system 6. The reflector 3 is provided with an angle adjustment measuring device 4; After the straight mirror 21 is collimated into a parallel light beam, it is reflected by the reflector 3 and incident on the surface of the measured object 5; the light beam reflected from the surface of the measured object 5 is then reflected by the reflective mirror 3 and collected by the feedback imaging system 6 imaging;

[0083] The feedback imaging system 6 is arranged between the light source 1 and the transmissive collimator 21, including a first feedback beam spli...

specific Embodiment 2

[0086] This embodiment is an embodiment of an autocollimation device with high precision and large working distance for array zeroing.

[0087] The array zeroing high-precision large working distance self-collimation device of this embodiment, the structural diagram is as follows Figure 5 shown. On the basis of the specific embodiment 1, the array zeroing high-precision large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0088] The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflector 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected ...

specific Embodiment 3

[0090] This embodiment is an embodiment of an autocollimation device with high precision and large working distance for array zeroing.

[0091] The array zeroing high-precision large working distance self-collimation device of this embodiment, the structural diagram is as follows Figure 6 shown. On the basis of the specific embodiment 1, the array zeroing high-precision large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0092] The wavefront detection system 7 includes a wavefront detection beamsplitter 71 and a mirror deformation wavefront detector 73; the wavefront detection beamsplitter 71 is arranged between the mirror 3 and the measured object 5, and the air disturbance wavefront detection The device 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary...

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