Substrate unit, element substrate, display device, and method for manufacturing display device
A manufacturing method and component substrate technology, applied in the direction of electrical components, chemical instruments and methods, semiconductor devices, etc., can solve problems such as poor heat resistance, recycling effect of glass carriers with residual glue, not as expected
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[0019] The substrate unit, the component substrate, the display device and the manufacturing method of the display device according to the preferred embodiments of the present invention will be described below with reference to the related drawings, wherein the same components will be described with the same reference symbols.
[0020] Before the process of thinning the display device, the surface of the carrier plate and the thin glass substrate will be subjected to cleaning processes such as water washing or ozone ashing. After the cleaning process is completed, the surface of the carrier plate and the thin glass substrate A hydroxyl group (-OH) will be produced. If the carrier plate is directly attached to the thin glass substrate, the subsequent high-temperature process (>250°C) will cause the hydroxyl groups between the two to react to form a silicon-oxygen bond (-Si-O-Si-), making the carrier plate and the thin glass substrate The thin glass substrate is not easy to sepa...
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