Plasma diffuser
一种等离子体、扩散器的技术，应用在电气元件、电路、纺织品和造纸等方向，能够解决限制增加价值的应用和市场、限制等问题
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Embodiment 1
[0193] Example 1 illustrates the influence of the openness of the material from which the plasma diffuser is made. Three different diffuser materials have been used: non-woven, braided and foil. All three materials as Figure 4E The same horizontal arrangement is depicted, but is used with left and right openings parallel to the wall of the chamber in which the monomer inlet is located. Nonwovens are used in single and double layer arrangements.
[0194] The same plasma polymerization process was carried out in a large plasma chamber of 490 l using each plasma diffuser according to Table 1 below:
[0195] parameter value monomer 1H,1H,2H,2H-Heptadecafluorodecyl Acrylate time 10 minutes electrode Primary (primary) – RF / M flow 40 sccm base pressure 20 mTorr work pressure 40 mTorr power 50W power mode continuous wave frequency 13.56MHz
[0196] Table 1: Process parameters according to Example 1
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Embodiment 2
[0203] Example 2 shows the effect of the degree of opening on both sides parallel to the wall in which the cell inlet is installed. The single layer nonwoven plasma diffuser of Example 1 has been used with 100% open left and right sides, and now also has only 25% open sides. Process according to the parameters in Table 1. The results can be seen in Table 3.
[0204]
[0205]Table 3: Summary of tests performed using four different plasma diffuser materials
[0206] From Table 3 it is evident that the less open side had a positive effect on the reduction in discoloration, and the oil grade was unaffected. However, the coatings deposited using this plasma diffuser were much thinner, which would explain the absence of discoloration. In cases where the criterion to be met is a certain level of oil repellency, such a relatively closed plasma diffuser may be considered. However, in cases where a combination of minimum coating thickness and reduction in discoloration is require...
Embodiment 3
[0208] Example 3 illustrates the fact that the wash performance of the samples was not affected by using a plasma diffuser. Woven textile samples made from 100% recycled PES were hung vertically in a plasma diffuser. The top and bottom sides parallel to the wall in which the cell inlet is located are 100% open. A 5 minute pretreatment and 10 minute coating process was performed on the coated textile samples in the absence and presence of a plasma diffuser. The process parameters used to carry out the coating process are given in Table 4.
[0209] parameter preprocessed value The value of the coating step monomer / gas Argon 1H,1H,2H,2H-Tridecafluorooctyl Acrylate time 5 minutes 10 minutes electrode Elementary – RF / M Elementary – RF / M flow 1000 sccm 40 sccm base voltage 50 mTorr 15 mTorr Operating Voltage 200 mTorr 20 mTorr power 600W 100W power mode continuous wave continuous wave frequency...
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