Multi-electrode energy integral type X-ray energy spectrum detector

Abstract

A multi-electrode energy integral type X-ray energy spectrum detector is provided; one side surface of an intrinsic semiconductor sensitive zone is provided with a P-type zone through heavy doping, and an N-type zone is formed on the other side surface through heavy doping; the surface, far away from one side of the intrinsic semiconductor sensitive zone, of the P-type zone is provided with a backside electrode; the intrinsic semiconductor sensitive zone and the N-type zone are isolated by shallow trenches so as to form a structure having more than 2 pixel units; the surface, far away from one side of the intrinsic semiconductor sensitive zone, of the N-type zone of each pixel unit is provided with a first forward electrode, a second forward electrode and a third forward electrode, wherein the lengths of said electrodes gradually increase in sequence; the forward electrodes of each pixel unit are commonly connected with an integrated circuit processor of the pixel unit respectively through a shaping filter and a charge integrator in sequence; the top end surface of each pixel unit forms an X-ray plane of incidence. The multi-electrode energy integral type X-ray energy spectrum detector can reduce the scanning time and ray dosage, and can improve time and space resolutions.

Description

technical field [0001] The invention relates to a detector. In particular, it relates to a multi-electrode energy-integrating X-ray energy spectrum detector for medical X-ray energy spectrum detection. Background technique [0002] Spectral CT (Computed Tomography, computerized tomography) mainly uses the difference in absorption of X-ray photons of different energies by human tissue to reconstruct images, which can achieve more accurate material separation and identification. A high-precision energy-sensitive X-ray detector is a key part of spectral CT. The multi-electrode silicon strip-shaped single photon counting detector is a relatively common direct X-ray detector at present. The positive electrodes arranged in sequence mainly realize the collection of photogenerated charges generated by the direct interaction between a single photon in the adjacent range and the Si semiconductor. , the detector distinguishes the energy of a single incident photon by detecting the he...

AI Technical Summary

Problems solved by technology

[0004] Photon counting detectors have many errors such as photocurrent stacking and inter-electrode charge sharing, and the counting rate cannot meet the actual clinical needs

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