Sapphire single crystal furnace is called re -detection system, sensor filtering method and switching method
A technology of a sapphire single crystal furnace and a detection system, which is applied in the field of realizing the weighing detection system of the sapphire single crystal furnace
Active Publication Date: 2019-06-25
NANJING CRYSTAL GROWTH & ENERGY EQUIP CO LTD
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[0036] Depend on figure 1 It can be seen that the weighing structure of the sapphire single crystal furnace in this example includes A weighing amplifier, B weighing amplifier, A signal amplifier, B signal amplifier, PLC and industrial computer.
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Abstract
The invention discloses a realization method of a sapphire single-crystal furnace weighing detection system. The sapphire single-crystal furnace weighing detection system comprises a weighing sensor A, a weighing sensor B, a signal amplifier A, a signal amplifier B, a PLC (Programmable Logic Controller) and an industrial control computer, wherein the measuring range of the weighing sensor B is greater than that of the weighing sensor A; the precision of the weighing sensor A is higher than that of the weighing sensor B. Weight A and weight B are processed by adopting a recursion average filtering method and a weighting filtering method to obtain a weight curve with relatively good sensitivity and smoothness. Meanwhile, interference-free switching is carried in a weight switching process of crystals to obtain a continuous and smooth crystal weight curve.
Description
technical field [0001] The invention relates to a method for realizing a weighing detection system of a sapphire single crystal furnace, and belongs to the technical field of sapphire single crystal furnace growth equipment. Background technique [0002] Sapphire (Sapphire) is a single crystal of aluminum oxide (Al2O3), with a wide optical transmission band, and has good light transmission from near ultraviolet (190nm) to mid-infrared. Sapphire crystal has excellent optical properties, mechanical properties and chemical stability, high strength, high hardness, corrosion resistance, and can work under harsh conditions close to 2000 °C, so it is widely used in infrared military devices, satellite space technology, Window material for high-intensity lasers. Its unique lattice structure, excellent mechanical properties, and good thermal properties make sapphire crystals the most ideal for practical semiconductor GaN / Al2O3 light-emitting diodes (LEDs), large-scale integrated cir...
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Patent Type & Authority Patents(China)
IPC IPC(8): C30B17/00C30B29/20
CPCC30B17/00C30B29/20
Inventor 李辉潘清跃江世成毛洪英宁斯琴王维川
Owner NANJING CRYSTAL GROWTH & ENERGY EQUIP CO LTD
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