An electron beam suspension zone melting furnace and melting method
An electron beam and zone technology, applied in the self-zone melting method, chemical instruments and methods, single crystal growth, etc., can solve problems such as crucible pollution, poor melting effect, and the purity of the final product cannot meet the requirements, and achieve heating efficiency High, temperature gradient is easy to control, saving space and production cost effect
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[0045] see figure 1 and figure 2 As shown, the furnace in the electron beam suspension area of the present invention adopts a vertical structure, which mainly includes a furnace body frame, an upper furnace chamber, a lower furnace chamber, a lifting mechanism for the upper furnace chamber, an upper charging mechanism, a lower charging mechanism, an annular electron gun, Gun moving mechanism, material rotating mechanism, high vacuum unit, vacuum observation window, man-machine control panel, argon-filled cooling system, cooling water system. Among them, the gun moving mechanism is driven by a servo electric cylinder, and the material rotating mechanism is driven by a servo motor. Under the action of the corresponding servo controller, the precise movement is realized through the control of the man-machine console, and crystal materials with complete performance are obtained.
[0046]The furnace body of the present invention is composed of an upper furnace chamber and a low...
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