Internal and external double microring resonator structure

A micro-ring resonator, outer ring technology, applied in the direction of instruments, optical waveguides, optics, etc., to achieve flat resonance peaks, easy to implement, and improve the effect of resonance characteristics

Inactive Publication Date: 2017-07-14
XI'AN POLYTECHNIC UNIVERSITY
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  • Application Information

AI Technical Summary

Problems solved by technology

This series or parallel multi-ring microring resonator can certainly overcome the shortcomings of single microring resonators, but as the number of rings increases, the overall size of the device will gradually increase. How to overcome this problem without increasing the size of the device? The disadvantages of single microring resonators are worthy of study

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  • Internal and external double microring resonator structure
  • Internal and external double microring resonator structure
  • Internal and external double microring resonator structure

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Embodiment Construction

[0025] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0026] The present invention has an inner and outer double microring resonator structure, such as figure 1 with figure 2 As shown, including N-Sub type substrate 1, the top of N-Sub type substrate 1 is provided with SiO 2 Buried layer 2, in SiO 2 The two sides of the top of the buried layer are respectively provided with an upper straight waveguide 3 and a lower straight waveguide 4, and the SiO 2 An outer ring waveguide 5 and an inner ring waveguide 6 are respectively arranged in the middle of the top of the buried layer.

[0027] An inner and outer double microring resonator structure of the present invention is mainly composed of silicon material:

[0028] The doping concentration of N-Sub substrate 1 is 1×10 14 cm -3 ~1×10 15 cm -3 , the dopant is P ions; the height of the N-Sub substrate 1 is 100 μm˜300 ​​μm, and the width is 2....

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Abstract

The invention discloses an internal and external double microring resonator structure comprising an N-Sub type substrate. A SiO2 buried layer is arranged on the top part of the N-Sub type substrate. An upper side straight waveguide and a lower side straight waveguide are respectively arranged at the two sides of the top part of the SiO2 buried layer. An external ring waveguide and an internal ring waveguide are arranged in the middle of the top part of the SiO2 buried layer. The internal and external double microring resonator structure has the advantages of flat harmonic peak and large free spectrum range so that the resonance characteristic of the microring resonator can be improved without increasing the chip area or the technology cost, and development of the microring resonator structure to the direction of high speed and low power consumption is facilitated.

Description

technical field [0001] The invention belongs to the technical field of optoelectronic devices, and in particular relates to an inner and outer double microring resonator structure. Background technique [0002] A microring resonator is a device that couples light waves back and forth in a microring waveguide and a straight waveguide to provide light energy feedback. It can be used to realize functions such as filtering, modulation, switching and delay in communication and signal processing. It is a kind of Very important resonator. [0003] With the rapid development of optical communication technology and information industrialization, not only higher requirements are put forward for optical communication systems, but also miniaturization and integration requirements are put forward for optical communication devices. Microring resonators have the advantages of high Q value, high speed, low loss, simple structure and small size, and are compatible with integrated circuit ma...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/12G02B6/122
CPCG02B6/12007G02B6/122
Inventor 冯松薛斌李连碧雷倩倩杨延飞宋立勋翟学军朱长军
Owner XI'AN POLYTECHNIC UNIVERSITY
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