253 results about "Micro ring resonator" patented technology

The invention relates to an ultra-high quality factor micro-ring resonator coupling structure, and belongs to the technical field of optoelectronic integration. The micro-ring resonator coupling structure comprises a silicon substrate, a first silicon dioxide cladding, a micro-ring, a second silicon dioxide cladding, a straight waveguide and a third silicon dioxide cladding which are sequentially stacked from bottom to top. In the coupling structure, during light transmission, the upper surface of the micro-ring and the lower surface of the straight waveguide are coupled, the roughness of the surfaces is reduced to the greatest extent through growth and chemical mechanical polishing, and the defect that in a traditional same-plane coupling scheme, during light transmission, double-side-wall coupling is conducted on the micro-ring and the straight waveguide is overcome; and extra loss and reflection caused by relatively large roughness due to etching are reduced. According to the invention, the coupling spacing can be accurately controlled, the additional loss and reflection of the coupling structure are reduced, the quality factor of the micro-ring resonator is effectively improved, and a key solution is provided for a high-precision filtering and high-precision sensing photon integrated chip.

An integrated diode laser having lower total noise power at its outlet is realized by positioning a Mach-Zehnder interferometer in the optical path between two micro-ring resonators of a Vernier filter.

A system for wavelength-accurate conversion includes a light source configured to pump a first color laser light and a device configured for Kerr-nonlinear wavelength conversion of the first color laser light to a signal laser light and an idler laser light, the device includes: a waveguide configured to couple to the light source; and a microring resonator coupled to the light source via the waveguide. The microring resonator configured to generate the signal laser light and the idler laser light. The microring resonator including a plurality of projections. A number of the projections is linked to a targeted output wavelength for at least one of the signal laser light or the idler laser light, and a refractive index grating strength of each projection of the plurality of projections is linked to a frequency mismatch between modes when comparing to a reference device lacking the plurality of projections.

Systems and methods are provided for devices and methods for implementing an optical neural network (ONN) by leveraging resonator structures, such on micro-ring resonators (MRRs). Examples include unit cells configured to perform a linear transformation on optical signals. Each unit cell comprises a plurality of signal mixing components optically coupled to between adjacent waveguides, where each signal mixing component corresponds to a distinct wavelength and is configured to mix optical signals on the adjacent waveguides at the distinct wavelength. Each unit cell also includes a plurality of phase tuning components each corresponding to a distinct wavelength and configured to adjust a phase of a mixed optical signal at the distinct wavelength.

The invention discloses a wavelength demodulation system for wavelength division multiplexing based on a microring resonator, comprising a microring resonator chip, a modulation signal generating circuit, a photoelectric signal conversion circuit and a frequency mixing filter circuit; the modulation signal generating circuit generates a sinusoidal oscillation modulation signal with a DC bias, and transmits it to the microring resonator chip and the frequency mixing filter circuit; the microring resonator chip converts input optical signals of different wavelengths into optical signals related to the wavelength, and transmits them to the photoelectric signal conversion circuit; the photoelectric signal conversion circuit converts the optical signal output by the microring resonator chip into an electrical signal, and transmits it to the frequency mixing filter circuit after amplification, and the frequency mixing filter circuit realizes the mixing and filtering of the sinusoidal oscillation modulation signal transmitted by the modulation signal generating circuit and the converted electrical signal, and outputs the demodulated voltage signal. The demodulation system disclosed by the invention can demodulate the sensor reflection signal based on a wide-spectrum light source, has low cost and small size, and can realize large-scale multiplexing.

The invention provides an 800G single-fiber bidirectional silicon optical chip, a device and a working point voltage control method, and relates to the field of chip manufacturing, and the silicon optical chip comprises four transmitters with different single-wave wavelengths of 200G and four receivers with different single-wave wavelengths of 200G which are integrated in the silicon optical chip. Optical signals of the transmitter and the receiver are coupled through the micro-ring resonator and the chip I / O COM waveguide, and the chip I / O COM waveguide transmits single-fiber bidirectional 800G optical signals to the outside through an external optical fiber. A photon integrated loop is constructed by using a modulator formed by four single-wave 200G emitting electrodes with different wavelengths and a receiver and a micro-ring resonator, and an external optical fiber connected with an external laser is mixed and integrated to the photon integrated loop to provide a light source, so that the transmission function of a chip in a single-fiber bidirectional 800G optical signal is realized.

Methods of making optic structures (e.g., microring resonator, meta-elements) include imprinting a first surface of a moldable polymer having at least one inverse micro / nano-feature into a second surface of a first polymeric cladding layer disposed on a second substrate to form at least one trench micro / nano-feature contrapositive to the at least one inverse micro / nano-feature. A liquid polymeric precursor is applied into the at least one trench micro / nano-feature where it is solidified to form a solid polymer. A difference between a first refractive index of the first cladding layer and a second refractive index of the solid polymer is ≥about 0.05. The solid is heated for thermal reflow to define a meniscus followed by applying a second polymeric cladding layer thereon. Organic cladded (e.g., microring resonator) optic structures are also provided, which may have a quality (Q)-factor of ≥about 5×105 around 770 nm wavelength).

The invention relates to a micro-ring resonator based on a multi-circle square structure, the micro-ring resonator comprises a coupling waveguide and a multi-circle square micro-ring resonant cavity, the coupling waveguide comprises an S-bend waveguide, an input waveguide and an output waveguide which are all single-mode waveguides, and the multi-circle square micro-ring resonant cavity comprises a crossed waveguide chain and a multi-mode waveguide section connected with the crossed waveguide chain. The multi-mode waveguide section comprises a multi-mode straight waveguide and a 90-degree multi-mode Euler bending waveguide. By introducing the multi-mode waveguide, the energy distribution of the guided mode on the side wall is reduced, and the transmission loss of the micro-ring resonant cavity is reduced. Through the arrangement of the multi-circle square micro-ring resonant cavity, the length of the micro-ring is increased within a limited size, and the Q value of the multi-circle square micro-ring resonant cavity is improved. By means of the 90-degree multimode Euler bending waveguide, compact 90-degree turning is achieved, generation of a high-order mode is restrained, and meanwhile the micro-ring surrounding area is increased. Therefore, a solution can be provided for the high-performance sensing unit for the integrated micro-ring sensor.

The present disclosure is applicable to a field of laser radar technology and provides a resonance module, a silicon-based external cavity chip, a laser, and a laser radar. The resonance module includes multiple main resonators and at least one auxiliary resonator, both of the main resonators and the auxiliary resonator are tunable micro-ring resonators; the multiple main resonators are cascaded in sequence through a connecting module to form a cascaded structure, and a vernier effect can be formed between two adjacent main resonators; when an auxiliary resonator is provided for matching the main resonator, coupling of the main resonator and the auxiliary resonator that are provided in a matching manner expands a free spectrum range of the main resonator. The tunable range of lasers applied to the laser radar and improve the scanning angle of the laser radar can be expanded.

The invention provides an all-optical triode light modulation system, a modulation method and application thereof. The all-optical triode light modulation system comprises a pump light source, a signal light source and a micro-ring modulator, wherein the micro-ring modulator comprises a micro-ring resonator and a Van der Waals material; pump light output by the pump light source enters the Van der Waals material from one side to generate resonance light absorption, and signal light output by the signal light source is coupled into the micro-ring resonator and interacts with the Van der Waals material, so that the signal light is modulated by the pump light. The all-optical modulation system which is simple in structure, high in modulation rate and short in response time is prepared by utilizing the limited band gap and resonance light absorption of visible and near-infrared bands of Van der Waals semiconductor materials and the resonance characteristic of the silicon-based micro-ring resonant cavity, rapid modulation of communication optical signals is achieved, and the communication efficiency is improved. And all-optical modulation of optical phase and / or amplitude can be realized.

The invention belongs to the field of reconfigurable on-chip spectrometers, and particularly discloses a reconfigurable on-chip spectrometer based on a low-loss GST superlattice phase change material. According to the invention, the GST-SL2 material is combined with the double-cascade micro-ring array architecture, so that the performance of the device is improved in a breakthrough manner, a large amount of spectral response can be generated only through a limited number of micro-ring resonators on a chip, the flexible regulation and control of the spectral resolution and the working bandwidth are supported, and the customization requirements of different application scenes are met; a resolution regulation and control array is formed by cascading # imgabs0 first MRRs which are arranged at equal intervals in the extension direction of a bus waveguide, the lengths of resonance micro-rings of the first MRRs are increased progressively, and due to the cascading design, through the synergistic effect of the multiple MRRs, the overall regulation and control capacity is remarkably enhanced, and it is ensured that sampling points can uniformly cover the whole working bandwidth of an on-chip spectrometer; the measurement bandwidth regulation and control array divides the working bandwidth into a plurality of channels, the irrelevance of a system response function is successfully enhanced, and a reliable basis is provided for spectrum reconstruction.

The invention relates to the field of water and soil conservation online monitoring, in particular to a photonic integrated chip and a soil interface dynamic monitoring device and method. Comprising a substrate, and a beam splitting and combining device, a micro-ring resonator and a grating coupler which are arranged on the substrate, the beam splitting and combining device is connected with the micro-ring resonators, the micro-ring resonators are connected with the grating coupler, the perimeter of each micro-ring resonator is different, and the micro-ring resonators are sequentially arranged at intervals in sequence. According to the invention, real-time monitoring of the soil interface is realized through an accurate optical method so as to determine the height position change of the soil and air interface and further monitor water and soil loss, the method has high sensitivity, non-contact property and sustainability, the efficiency of water and soil loss monitoring can be effectively improved, and reliable technical support is provided for the fields of agriculture, environmental protection and the like.

Provided are a silicon-based tunable filter, laser and an optical module. The tunable laser comprises a semiconductor optical amplifier and a silicon photonic integrated chip, wherein a first coupler, a phase regulator and a tunable filter are provided on the silicon photonic integrated chip; the tunable filter comprises a flat-top band-pass filter structure, a Mach-Zehnder interferometry (MZI) structure and a micro ring resonation (MRR) structure, which are cascaded; gain light emitted by the semiconductor optical amplifier is coupled to the silicon photonic integrated chip by means of the first coupler, and a narrowband filtered optical signal is output by means of the tunable filter; and the phase of the gain light is regulated by means of the phase regulator so as to output single-peak narrowband laser light with a tunable target wavelength.

This document describes an electro-optic photonic memory device comprising a micro-ring resonator, and at least one ferroelectric field effect transistor (FeFET) that is disposed along a partial circumference of a raised ring waveguide of the micro-ring resonator. The FeFET comprises a ferroelectric gate stack and a heterojunction channel layer.

The invention relates to a target gas adjustable photoacoustic gas concentration sensor and application thereof, and belongs to the technical field of sensors. The sensor comprises a sound pressure detection unit, a light wave generation unit, a sound pressure detector, a light source and a micro-ring resonator, the sound pressure detection unit is internally provided with the sound pressure detector and the light wave generation unit, the light wave generation unit is internally provided with the light source and the micro-ring resonator, and the sound pressure detection unit comprises a first substrate and a first shell. A first shell is arranged on the upper side of the first substrate in a sealed mode, a sound pressure detector and a light wave generating unit are arranged on the first substrate in the first shell, and air holes are formed in the side wall of the first shell. The design that the sound pressure detector is used for direct testing is adopted, the micro-ring resonator with the refractive index changed through heating is arranged behind the light source, the wavelength of the detection light is changed, and then concentration detection of various kinds of gas is achieved.

The invention discloses a device for narrowing the line width of a laser and expanding the tuning range. The device comprises a laser used for generating single-mode signal light for communication; the input end of the spot size converter is connected with the output end of the laser, and the spot size converter is used for matching the mode field of the laser with the mode field of the output waveguide; the input end of the 1 * N splitter is connected with the output end of the spot size converter, and the 1 * N splitter is used for distributing the optical signals to the N paths of output waveguides; the first phase shifter is deposited on the connecting waveguide between the output end of the spot size converter and the input end of the 1 * N splitter; and N runway type micro-ring resonators, each runway type micro-ring resonator is coupled with one path of output waveguide, and the N runway type micro-ring resonators and the N paths of output waveguides form an equivalent parallel coupling structure. The problem that in the prior art, in order to give consideration to the narrow linewidth and the wide tunable range of the laser, a scheme with high structural complexity and complex production process requirements is adopted, and consequently the cost is too high is solved.

Techniques for programmable microring resonators are disclosed. In an illustrative embodiment, microring resonator is coupled to a waveguide. Due to process variations, the coupling rate between the microring resonator and the waveguide can vary. In order to tune the coupling regime between the microring resonator and the waveguide, a diode that forms part of the microring resonator can be forward biased, increasing the free carrier density and absorbing some of the light in the microring resonator. The forward biased diode can be used for various applications, such as to control the quality factor of the microring resonator, control a chirp on the light, and / or impart a blueshift to the microresonator.

A laser cavity-based sensor and a sensing method for measuring a measurand are provided. The laser cavity-based sensor includes a laser cavity configured to generate light at a resonant wavelength and having a gain medium and a resonant structure. The resonant structure has a sensing micro-ring resonator (MRR) and a control MRR arranged in a Vernier configuration defining the resonant wavelength of the laser cavity. At least a portion of the sensing MRR is accessible for interaction with said measurand. The sensing method involved operating the laser cavity at an initial resonant wavelength, interacting the measurand with the sensing MRR, tuning the control MRR to operate the laser cavity at a shifted resonant wavelength, and calculating a wavelength shift of the resonance wavelength of the laser cavity induced by the measurand.

A process variation tolerant microring resonator is designed based on fabrication process variation (FPV) map data that includes one or more FPV maps that indicate a process variation in a substrate. Waveguide parameter data are estimated from the FPV map, where the waveguide parameter data include estimated waveguide parameters as they are affected by process variations. Microring resonator parameter data are generated from the FPV map data and waveguide parameter data. The microring resonator parameter data includes estimated microring resonator parameters as they are affected by process variations. The waveguide parameter data and microring resonator parameter data can be output as a design for a process variation tolerant microring resonator, which can be further optimized based on user feedback or other constraints.

The lithium niobate-silicon nitride waveguide structure comprises a silicon substrate layer, a first silicon oxide isolation layer, a second silicon oxide isolation layer, a lithium niobate thin film layer and a silicon oxide dielectric layer which are stacked in sequence, the second silicon oxide isolation layer is wrapped with a silicon nitride layer; the thickness of the second silicon oxide isolation layer between the silicon nitride layer and the lithium niobate thin film layer is 50 + / -10nm; the thickness of the silicon nitride layer is 400 + / -10nm, and the thickness of the lithium niobate film layer is 600 + / -50nm; the silicon oxide dielectric layer is provided with at least two electrodes which are arranged at intervals. According to the lithium niobate-silicon nitride waveguide structure, the preparation method and the optical gyroscope provided by the invention, on the basis of the advantages of silicon nitride and lithium niobate materials, an ultra-low-loss silicon nitride waveguide, an ultra-high-Q-value micro-ring resonator and a high-modulation-rate lithium niobate modulator are obtained at the same time through a lithium niobate and silicon nitride hybrid integration method; and thus, the overall performance of the resonant integrated optical gyroscope is improved.

The invention relates to the technical field of laser devices, in particular to a Brillouin semiconductor laser device which comprises a gain chip, a Brillouin semiconductor laser device and a Brillouin semiconductor laser device, a Bragg grating; a microring resonator; the beam splitter is located between the micro-ring resonator and the Bragg grating; wherein the gain chip is used for generating spontaneous radiation light, the Bragg grating and the high-reflection film form a resonant cavity, the spontaneous radiation light is processed by the resonant cavity to form pump light, the pump light is injected into the micro-ring resonator through a second end of the Bragg grating, the micro-ring resonator generates a stimulated Brillouin scattering effect to generate Stokes light, and the Stokes light is transmitted to the high-reflection film. The micro-ring resonator carries out mode selection amplification on the Stokes light, ultra-narrow linewidth Brillouin laser is output from the first end of the micro-ring resonator, and the beam splitter outputs the ultra-narrow linewidth Brillouin laser according to a preset proportion. According to the Brillouin semiconductor laser, the integration level and the compactness of the Brillouin semiconductor laser are improved while it is guaranteed that the Brillouin semiconductor laser has excellent performance.

The invention relates to the technical field of silicon-based photonic integration, and provides a waveguide memory based on an optical storage medium, a manufacturing method of the waveguide memory and a memory device, and the manufacturing method of the waveguide memory based on the optical storage medium comprises the following steps: simulating a runway type micro-ring resonator; determining an optimal coupling gap and an optimal coupling length between the runway micro-ring resonant cavity and the bus waveguide, manufacturing a core layer, forming the runway micro-ring resonant cavity and the bus waveguide on the core layer according to the optimal coupling gap and the optimal coupling length, and depositing an optical storage medium on the bus waveguide by magnetron sputtering to obtain the optical storage medium. The optical storage medium can change the phase change state of the stress position under the action of external excitation so as to realize information storage through different phase states of the optical storage medium. The invention also provides a waveguide memory and a memory device obtained based on the manufacturing method. The waveguide memory prepared by the preparation method is non-toxic, friendly to human body and environment, low in manufacturing cost, simple in structure and easy to manufacture on a large scale.

An electro-optical semiconductor chip includes a ring-shaped optical waveguide and a bus optical waveguide extending past the ring-shaped optical waveguide, such that an optical coupling region exists therebetween. A doped-silicon non-silicided region is disposed outside of the ring-shaped optical waveguide and within thermal communication with the ring-shaped optical waveguide. An inner contact region is formed of silicided silicon along an inner side of the doped-silicon non-silicided region. An outer contact region is formed of silicided silicon along an outer side of the doped-silicon non-silicided region. A first plurality of electrical contacts electrically contact the inner contact region. A second plurality of electrical contacts electrically contact the outer contact region. A voltage differential between the first and second pluralities of electrical contacts controls an electrical current flow through the doped-silicon non-silicided region to control a temperature of at least a portion of the ring-shaped optical waveguide.

Systems, devices, and methods are provided for all-optical reconfigurable activation devices for realizing various activations functions using low input optical power. The device and systems disclosed herein include a directional coupler comprising a first phase-shift mechanism and an interferometer coupled to the directional coupler. The interferometer comprises at least one microring resonator and a second phase-shift mechanism coupled to thereto. The interferometer and the directional coupler comprise waveguides formed of a first material, while the microring resonator comprises a waveguide formed of a second material and a third phase-shift mechanism. The second material is provided as a low-loss material having a high Kerr effect and large bandgaps, to generate various nonlinear activation functions. The first, second, and third phase-shift mechanisms are configured to control biases within the disclosed systems and devices to achieve a desired activation function.

The invention provides a high-efficiency micro-ring acousto-optic modulator, which combines high sensitivity and sound wave regulation and control capability of a micro-ring resonator, adopts two pairs of optical waveguides and acoustic waveguides with grating couplers, realizes flexible control of sound wave and light wave propagation directions, can be configured to perform common or reverse propagation, and can be used for acoustic wave and light wave propagation. The method is suitable for exploring the time reversal symmetry and the optical nonreciprocity of the system. The device adopts the sapphire substrate, by virtue of high mechanical strength, high sound velocity and low acoustic loss, the sound wave mode quality and transmission stability are improved, and meanwhile, high-quality integration with silicon dioxide and lithium niobate films is ensured; the silicon substrate has remarkable advantages in the aspects of micro-nano processing, heat conductivity and electro-optical system compatibility, and large-scale manufacturing and system integration are facilitated. In addition, a chalcogenide waveguide with low optical loss is introduced into the device, so that the light field constraint and locality are enhanced, the overlapping and coupling strength of an acousto-optic mode is improved, and meanwhile, the interface scattering loss is reduced.

There is provided an external cavity laser, including: a photonic integrated platform including a gain chip providing a gain medium and at least one reflector chip, the photonic integrated platform including first and second functional layers made of different materials; a resonant cavity optically coupled to the gain medium and including a first and a second micro-ring resonators (MRR) in a Vernier configuration, the first MRR and second MRR extending within respective ones of the first and second functional layers made of different materials and having corresponding group indices, the first and second MRRs having different radii selected in view of said corresponding group indices; and a tuning mechanism for tuning a spectral response of at least one of the first and second MRR.

The invention relates to the field of semiconductor lasers, in particular to a high-power narrow-linewidth hybrid integrated laser, which comprises a wide waveguide laser gain chip and a silicon-based external cavity photon chip, and is characterized in that the silicon-based external cavity photon chip comprises a tip multi-section edge coupler, a bus waveguide, at least three cascaded micro-ring resonators and a feedback assembly; the tip multi-section edge coupler comprises a tip waveguide array and a conical combined waveguide, the tip waveguide array is composed of inverted conical waveguides arranged side by side, and the width of the input end face of each inverted conical waveguide is smaller than that of the output end face of each inverted conical waveguide; and the width of the conical combined waveguide is gradually reduced from the input end to the output end. The invention solves the industrial problem that high power and narrow linewidth are difficult to consider in the hybrid integrated laser, has the advantages of high output power, extremely narrow linewidth, wide tuning range, high coupling efficiency, good process tolerance, high integration level and the like, and provides a high-performance light source for the next generation of coherent optical communication, laser radar and precision measurement system.

Embodiments disclosed herein include an on-cavity photonic integrated circuit (OCPIC). In an embodiment, the OCPIC comprises a laser transmitter, that comprises a row with four bumps, and a micro-ring resonator (MRR) in the row between a first bump and a second bump of the four bumps. In an embodiment, a cavity is below the MRR, where a diameter of the cavity is substantially equal to a spacing between the first bump and the second bump.

The invention discloses an OAM vortex communication system device and method of a silicon-based photon integrated micro-ring resonator array, and belongs to the technical field of wireless communication of the Internet of Things. The system comprises a silicon-based photon integrated micro-ring resonator array, and ultra-compact OAM beam generation is realized through thermo-optical tuning; according to the lightweight channel compensation architecture, a dual-branch DNN model is combined with NV color center quantum sensing to realize phase noise real-time calibration; and dynamic regulation and control of a heterogeneous multi-user access mechanism and fusion AI drive. The method solves the problems of beam divergence, channel time-varying sensitivity and multi-user interference of a traditional OAM technology in an Internet of Things scene, the mode purity under the millimeter wave (28GHz) frequency band reaches 99% or above, and the method is suitable for intensive Internet of Things scenes such as industry 4.0, automatic driving and intelligent agriculture.

The invention belongs to the technical field of optical calculation, and particularly relates to an intensity-phase mixed silicon-based photon modulator. According to the hybrid silicon-based photon modulator, a PIN micro heater formed by ion implantation is integrated on two arms of a Mach-Zehnder interferometer or a micro-ring resonator, and a phase change material and a protective layer are deposited in a window above the micro heater; electric pulses are applied to metal electrodes at the two ends of the micro heater to drive local reversible crystalline and amorphous transformation of the phase change material, and phase modulation of passing optical signals is achieved; meanwhile, constant voltage signals are applied to the two ends of the PIN micro heater, and intensity modulation is generated on passing optical signals through the carrier absorption effect. The two modulation modes are mutually independent and do not interfere with each other, and two groups of independently variable weight values can be stored in the device. The hybrid silicon-based photon modulator can be used in a large photon neural network, high-speed and high-parallelism convolution operation is carried out, and the overall end-to-end insertion loss of a chip is reduced.