Transistor acoustic sensing element, preparation method thereof, acoustic sensor and portable device

Abstract

The present invention provides a transistor acoustic sensing element, a preparation method thereof, an acoustic sensor and a portable device. The transistor acoustic sensing element comprises a gate, a gate insulation layer, a first pole, an active layer and a second pole which are all arranged on a substrate; the active layer is of a nanometer fine wire three-dimensional mesh structure; and the active layer generates vibration under the action of sound signals, so that the output current of the transistor acoustic sensing element changes correspondingly. According to the transistor acoustic sensing element, the active layer of the nanometer fine wire three-dimensional mesh structure is adopted, so that the detection of the sound signals can be realized; since the active layer of such kind structure can sense the weak vibration of acoustic waves sensitively, the active layer of such kind structure can improve the sensitivity of the transistor acoustic sensing element to the sound signals, and therefore, the sensing performance of the transistor acoustic sensing element to sound can be improved.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a transistor acoustic sensing element, a preparation method thereof, an acoustic sensor and a portable device. Background technique [0002] In recent years, with the rapid development of artificial intelligence, wearable electronics, and the Internet of Things, sensors have received more and more attention. People's performance requirements for sensors have also changed from traditional detection of source signals to high sensitivity of devices. , multi-type, flexible, small size and other directions. [0003] Among them, acoustic sensors are widely used in intelligent bionic robots, wearable and other fields because they can perceive the changes of sound signals. However, the basic structure, process and performance of traditional acoustic sensors are difficult to meet the sensitivity, flexibility and small size requirements of people in the field of artificial intelligence or...

AI Technical Summary

Problems solved by technology

However, the basic structure, process and performance of traditional acoustic sensors are difficult to meet the sensitivity, flexibility and small size requirements of people in the field of artificial intelligence or wearable electronics.

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