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A fast phase extraction method for three random phase-shifted interferograms

A phase-shifting interference and phase extraction technology, which is applied in the direction of instruments, measuring devices, optical devices, etc., can solve the problems that cannot meet the requirements of accurate phase extraction, and achieve the effect of rapid extraction

Active Publication Date: 2019-08-09
HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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Problems solved by technology

[0005] Although the phase-shifting interferometric phase extraction method proposed by people can extract the phase when there are many interference fringes, these methods have their own shortcomings and cannot meet the requirements of fast and high-precision phase extraction from random phase-shifting interferograms.

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  • A fast phase extraction method for three random phase-shifted interferograms
  • A fast phase extraction method for three random phase-shifted interferograms
  • A fast phase extraction method for three random phase-shifted interferograms

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Embodiment Construction

[0059] The present invention will be further described below in conjunction with the description of the drawings and specific embodiments.

[0060] Such as figure 1 As shown, a fast phase extraction method for three random phase-shifted interferograms, including the following steps:

[0061] S1, collecting three random interferograms;

[0062] S2. Perform pairwise subtraction on the collected random interferograms;

[0063] S3, normalize the ellipse formula obtained by simplification, and perform super least squares ellipse fitting to solve ellipse parameters;

[0064] S4, performing super least squares ellipse fitting and ellipse normalization respectively;

[0065] S5. Find out the phase.

[0066] The fast phase extraction method of the three random phase-shifted interferograms specifically includes:

[0067] Step 1: During the actual phase-shifting interference process, due to factors such as air disturbance, mechanical vibration, and nonlinearity of the phase shifter, t...

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Abstract

The present invention provides a fast phase extraction method for three random phase-shifted interferograms. The method comprises the steps of (S1) collecting three random interferograms, (S2) carrying out pairwise subtraction operations on the collected random interferograms, (S3) carrying out an addition or subtraction operation on the random interferograms, (S4) normalizing an elliptical formula obtained by simplification and performing super least square elliptic fitting to solve ellipse parameters, and (S5) solving a phase. The method has the advantages that an ellipse parameter formula is through two steps of addition and subtraction operations, influence of background light intensity can be reduced or even eliminated, then the super least square elliptic fitting is used to obtain the ellipse parameters, the phase can be directly calculated through the ellipse parameters, the method is not limited by the fringes in the interferograms, and the phase can be precisely and quickly extracted from the three random phase-shifted interferograms.

Description

technical field [0001] The invention relates to a phase extraction method, in particular to a fast phase extraction method for three random phase-shifted interferograms. Background technique [0002] With the rapid development of modern technology and the improvement of the integration of components, the industry has higher and higher requirements for the detection accuracy of parts. Micro-surface topography measurement technology can be divided into contact measurement technology and non-contact measurement technology according to the different modes of interaction with the measured surface. Although contact measurement has high measurement accuracy, it has been gradually eliminated by the industry because it will cause damage to the surface of the test sample. Non-contact surface topography measurement methods based on various principles are constantly emerging, and the measurement accuracy and measurement speed have been greatly improved. Among the non-contact measureme...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00
CPCG01B11/00
Inventor 姚勇雷何兵刘昊鹏田一婷吴昊堃杨彦甫
Owner HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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