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Pressure measuring unit and method of applying the measuring structure

A technology of measuring unit and measuring mechanism, which is applied in measuring devices, measuring instrument components, measuring fluid pressure, etc., can solve the problems of complex and expensive thin-film technology, reduce manufacturing costs, prevent short circuits and electrochemical corrosion, and achieve low-cost Effect

Pending Publication Date: 2018-02-23
ROBERT BOSCH GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These thin-film processes are complex and expensive and must be performed in a clean room so that the thin-films can be produced without inclusions, contamination or defects

Method used

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  • Pressure measuring unit and method of applying the measuring structure
  • Pressure measuring unit and method of applying the measuring structure
  • Pressure measuring unit and method of applying the measuring structure

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Embodiment Construction

[0029] as by Figure 1 to Figure 8 It can be seen that the illustrated exemplary embodiments of pressure measuring cells 50 , 50A, 50B, 50C each comprise a carrier 52 , 52A, 52B, 52C forming a measuring membrane 52 . 1 . Measuring membrane 52.1 is deformed under the effect of pressure P to be detected. A measuring structure 55 is applied to the carrier 52 , which detects the deformation of the measuring membrane 52 . 1 and generates at least one electrical output signal representing the detected pressure P . Measuring structures 55 are printed on carrier 52 here.

[0030] as by Figure 1 to Figure 8 It can further be seen that in the illustrated exemplary embodiments of the pressure measuring cells 50 , 50A, 50B, 50C an insulating layer 54 is applied between the measuring structure 55 and the surface of the carrier 52 . Furthermore, a protective layer 57 is applied to the measuring structure 55 in order to protect the measuring structure from contamination and moisture.

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PUM

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Abstract

The invention relates to a pressure measuring unit (50) and a method of applying the measuring structure. The pressure measurin unit has a carrier (52) which forms a measuring diaphragm (52.1) which deforms under the action of a pressure (P) to be detected. A measuring structure (55) is applied to the carrier (52), detects the deformation of the measuring diaphragm (52.1) and generates at least one electrical output signal representing the detected pressure (P). The invention also relates to a measuring mechanism and a pressure sensor mechanism with the pressure measuring unit (50). The measuring structure (55) is printed on the carrier (52).

Description

technical field [0001] The invention relates to a pressure measuring cell or a method for applying a measuring structure of the type according to the independent claims. The object of the invention is also a measuring device and a pressure sensor device having such a pressure measuring cell. Background technique [0002] Pressure sensor assemblies made from several parts are known from the prior art for pressure measurement. The conversion of the pressure into an electrical signal takes place via a so-called pressure measuring cell. A measuring bridge, preferably a Wheatstone bridge, is applied to the pressure measuring cell by means of various thin-film technologies. These thin-film processes are complex and expensive and must be performed in a clean room so that the thin-films can be produced without inclusions, contamination or defects. For thin-film processes, at least the surface of the pressure measuring cell must be ground. [0003] DE 10 2014 221 365 A1 discloses...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/00G01L19/00G01L19/14
CPCG01L9/0041G01L9/0051G01L19/0069G01L19/14G01D11/30G01L9/0058G01L19/0061G01L19/143G01D11/245G01L19/142
Inventor H·赛班德M·施利兹库斯R·瓦尔S·莱赫伯格V·诺特曼
Owner ROBERT BOSCH GMBH