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A microelectrode array chip and its manufacturing method

A technology of microelectrode array and manufacturing method, which is applied in the direction of circuits, electrical components, microstructure technology, etc., can solve problems such as the inability to accurately locate stimulation sites, achieve good insulation performance, light transmittance, and simple manufacturing process

Active Publication Date: 2020-01-31
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a microelectrode array chip and its manufacturing method, which is used to solve the problem that the microelectrode array chip in the prior art cannot accurately locate the stimulation site

Method used

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  • A microelectrode array chip and its manufacturing method
  • A microelectrode array chip and its manufacturing method
  • A microelectrode array chip and its manufacturing method

Examples

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Embodiment 1

[0056] Such as Figure 1 to Figure 16 , the invention provides a kind of manufacturing method of microelectrode array chip, described manufacturing method comprises:

[0057] S1: providing a first substrate 1a, and forming a metal electrode array 2 on the first substrate 1a;

[0058] S2: forming an insulating layer 3 above the structure obtained in S1, etching the insulating layer 3 to expose the electrode site array 21 and electrode pins 22 on the metal electrode array 2, forming a micro-electrode array structure;

[0059] S3: providing a second substrate 1b, forming a micro-pipe pattern array 4 on the second substrate 1b;

[0060] S4: pouring a covering layer 5 over the structure formed in S3 to form grooves 8 corresponding to the micro-pipe pattern array 4 on the covering layer 5;

[0061] S5: Peel off the cover layer 5 and form a through hole through the groove 8 and the cover layer 5 at the outer edge of the groove 8 to form an inlet array 10;

[0062] S6: Align and bo...

Embodiment 2

[0104] Such as Figure 15 with Figure 16 As shown, the micro-electrode array chip of the present invention is produced through the above-mentioned manufacturing process, including: a micro-electrode array structure, a micro-pipeline array structure located above the micro-electrode array structure, and a micro-pipe array structure located above the micro-pipe array structure culture chamber ring; wherein,

[0105] The micropipe array structure is composed of a plurality of micropipes, and the micropipe includes a groove, a stimulation port and a sample inlet respectively connected to both ends of the groove, wherein the stimulation port is connected to the microelectrode array structure. The electrode sites are corresponding, and both the stimulation port and the electrode sites are located inside the culture chamber ring, and the sample inlet is located outside the culture chamber ring.

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Abstract

The invention provides a microelectrode array chip and a manufacturing method thereof. The manufacturing method includes the following steps: manufacturing a microelectrode array structure on a firstsubstrate; manufacturing a covering layer with a microtube array on a second substrate; removing the covering layer, and punching holes in the covering layer to form a sample inlet array; performing aligned lamination on the covering layer with the sample inlet array and the microelectrode array structure; adding a thermally decomposed polymer solution at a sample inlet, filling the entire micro-tube with the polymer solution, heating and curing the polymer solution, and then removing the covering layer with the sample inlet array; forming a photoresist cured film with a stimulation opening array on the structure of S7; heating the structure of S8 to ensure that a thermally decomposed polymer is vaporized and volatilized, and forming a microtube array structure; and then bonding a cultivation chamber ring above the microtube array structure. According to the microelectrode array chip and the manufacturing method thereof provided by the invention, the problem that the microelectrode array chip cannot accurately position stimulation sites in the prior art can be solved.

Description

technical field [0001] The invention relates to the field of biosensor production, in particular to a microelectrode array chip and a production method thereof. Background technique [0002] Micro-electrode array (MEA: multi-electrode array) developed based on MEMS (Micro-Electro-Mechanical Systems: Micro-Electro-Mechanical Systems) technology is an important technical means for studying neuron electrophysiology and cardiomyocyte electrophysiology. Its The technical advantages are reflected in: (1) it can perform multi-point electrical stimulation and parallel recording of electrophysiological signals on cell populations; (2) it can conduct long-term analysis of the electrophysiological activity of electroactive cell populations without damage detection. [0003] In order to study the function of electroactive cells such as neurons and cardiomyocytes, it is necessary to detect the electrophysiological response of cells to external stimuli (such as electrical stimulation, che...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81C1/00B81B7/00G01N33/483
CPCB81B7/0009B81C1/00214G01N33/4836
Inventor 吴蕾李刚金庆辉赵建龙
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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