Polarizer calibration device and method
The technology of a calibration device and calibration method is applied in the directions of measuring devices, image detector methods, image signal processing, and testing optical performance, and can solve problems such as angle deviation
Active Publication Date: 2018-07-24
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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Problems solved by technology
[0004] In order to overcome the existing problems, the present invention provides a polarizer calibration device and method to solve the problem that the angle between the alignment mark connection line and the polarization axis of the polarizer is prone to deviation after undergoing different processes
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[0057] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be noted that all the drawings of the present invention are in simplified form and use inaccurate scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.
[0058] Such as figure 2 As shown, the polarizer calibration device of the present invention comprises:
[0059] A light source unit 1, configured to generate a non-polarized collimated light source;
[0060] A polarizer fixing unit, used to fix the polarizer 4;
[0061] The detector is used to detect the alignment mark on the polarizer 4, and the detector in this implementation preferably adopts the alignment CCD camera 2;
[0062] The polarization analyzer is arranged under the polarizer fixing uni...
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The invention provides a polarizer calibration device and method. The polarizer calibration device includes a light source unit, a polarizer fixing unit, a detector used for detecting the alignment marks of a polarizer, a polarization analyzing unit arranged below the polarizer fixing unit, and a worktable motion control unit used for controlling the horizontal motion of the polarizer and the polarization analyzing unit. The polarizer fixing unit and the polarization analyzing unit are arranged on the worktable motion control unit. The polarizer calibration method includes the following steps:setting a reference direction; measuring and calculating the included angle between the connecting line of the alignment marks on the polarizer and the reference direction; measuring the included angle between the polarization axis on the polarizer and the reference direction; and calculating the included angle between the connecting line of the alignment marks on the polarizer and the polarization axis. By using the polarizer calibration device and method provided by the invention, the included angle between the connecting line of the alignment marks and the polarization axis can be accurately calibrated, and the problem that the included angle between the polarization axis and the connecting line of the alignment marks deviates after different processes is solved.
Description
technical field [0001] The invention relates to the field of polarizer calibration, in particular to a polarizer calibration device and method. Background technique [0002] As we all know, polarizers, glass plates, liquid crystals, etc. all have polarization properties, and a large number of these components with polarization properties are used in optical products and experiments. The detection of polarization angle or optical axis angle of these components is particularly important. [0003] Such as figure 1 As shown, in the manufacturing process of some products, it is necessary to use a polarizer with alignment marks 12 and polarizing regions 11 at the same time, but the production of polarizing regions 11 and alignment marks 12 uses two completely different processes For example, the polarizing region 11 is made by immersion interference lithography, and the alignment mark 12 is made by mask projection lithography or electron beam lithography. After two completely di...
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IPC IPC(8): G01M11/02
CPCG01M11/00G01N21/95G01N2021/1765G01N2021/8887G01N2021/9511G02B5/3025
Inventor 李玉龙许琦欣
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD