A polarizer calibration device and method
A technology of calibration device and calibration method, which can be applied to measurement devices, image detector methods, image signal processing, instruments, etc., and can solve problems such as angle deviation.
Active Publication Date: 2020-04-10
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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Problems solved by technology
[0004] In order to overcome the existing problems, the present invention provides a polarizer calibration device and method to solve the problem that the angle between the alignment mark connection line and the polarization axis of the polarizer is prone to deviation after undergoing different processes
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[0057] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be noted that all the drawings of the present invention are in simplified form and use inaccurate scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.
[0058] Such as figure 2 As shown, the polarizer calibration device of the present invention comprises:
[0059] A light source unit 1, configured to generate a non-polarized collimated light source;
[0060] A polarizer fixing unit, used to fix the polarizer 4;
[0061] The detector is used to detect the alignment mark on the polarizer 4, and the detector in this implementation preferably adopts the alignment CCD camera 2;
[0062] The polarization analyzer is arranged under the polarizer fixing uni...
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The invention provides a polarizer calibration device and method, the polarizer calibration device includes a light source unit; a polarizer fixing unit; a detector, used to detect the alignment mark of the polarizer; Below the unit; the workbench motion control unit is used to control the horizontal movement of the polarizer and the analyzer unit; the polarizer fixing unit and the analyzer unit are arranged on the worktable motion control unit, and the polarizer calibration method includes setting Determine a reference direction; measure and calculate the angle between the line of the alignment mark on the polarizer and the reference direction; measure the angle between the polarization axis on the polarizer and the reference direction; calculate the angle between the line of the alignment mark on the polarizer and the polarization axis angle between. The polarizer calibration device and method provided by the present invention can accurately calibrate the angle between the alignment mark line and the polarization axis, and solve the problem that the angle between the polarization axis and the alignment mark line deviates after going through different processes .
Description
technical field [0001] The invention relates to the field of polarizer calibration, in particular to a polarizer calibration device and method. Background technique [0002] As we all know, polarizers, glass plates, liquid crystals, etc. all have polarization properties, and a large number of these components with polarization properties are used in optical products and experiments. The detection of polarization angle or optical axis angle of these components is particularly important. [0003] Such as figure 1 As shown, in the manufacturing process of some products, it is necessary to use a polarizer with alignment marks 12 and polarizing regions 11 at the same time, but the production of polarizing regions 11 and alignment marks 12 uses two completely different processes For example, the polarizing region 11 is made by immersion interference lithography, and the alignment mark 12 is made by mask projection lithography or electron beam lithography. After two completely di...
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IPC IPC(8): G01M11/02
CPCG01M11/00G01N21/95G01N2021/1765G01N2021/8887G01N2021/9511G02B5/3025
Inventor 李玉龙许琦欣
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD