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ODMR functional part integrated diamond NV magnetometer and manufacturing technology thereof

A diamond and magnetometer technology, applied in the direction of the size/direction of the magnetic field, can solve the problems of large volume, high integration and low integration of the magnetometer, and achieve high collection efficiency and reduce intermediate losses.

Active Publication Date: 2018-12-11
ZHONGBEI UNIV
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  • Abstract
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Problems solved by technology

[0005] The present invention aims to overcome the deficiencies of the prior art, solve the problems of large volume and low integration of magnetometers at the present stage, and provide a diamond NV magnetometer with integrated ODMR functional components and its manufacturing process. The present invention is based on a diamond substrate. Using micro-nano processing technology and micro-assembly technology to achieve efficient excitation of NV color centers, full fluorescence collection and high-efficiency microwave modulation ODMR system, and apply it to the high-precision detection of weak magnetic signal collection, the integration of the whole system is high

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  • ODMR functional part integrated diamond NV magnetometer and manufacturing technology thereof
  • ODMR functional part integrated diamond NV magnetometer and manufacturing technology thereof
  • ODMR functional part integrated diamond NV magnetometer and manufacturing technology thereof

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Embodiment Construction

[0032] In order to make the purpose, features and advantages of the present invention understandable, the specific implementation manners of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0033] like figure 1 , figure 2 As shown, the present invention cleverly uses the optical functional film structure, takes the block diamond 4 as the main body, and prepares a light-trapping structure in which the optical film wraps the diamond 4 medium, and integrates ODMR test-related functional components on this structure to realize integrated NV magnetic strong plan. Its structure mainly includes four parts: light trapping structure, ring microwave antenna 2, laser diode 1 and photodiode 6:

[0034] The light-trapping structure is to grind and reshape 4 blocks of diamonds prepared with NV color center ensembles to obtain terraced diamonds 4, and then prepare a multi-layer dielectric composite reflective film 3 on the upper surf...

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Abstract

The invention discloses an ODMR functional part integrated diamond NV magnetometer and a manufacturing technology thereof, and belongs to the fields of solid state atom magnetometers and micro nano processing. A block-shaped diamond prepared with an NV color center ensemble is edged and shaped into a step-shaped diamond, a multi-layer medium combined reflective film is prepared in the upper surface of the diamond in a film growth technology, a multi-layer medium combined cutoff filtering film is prepared in the bottom, the two types of optical functional films wrap a diamond medium to form a light tripping structure, an annular microwave antenna is prepared on the light tripping structure with the diamond as the main body, a light through hole is cut, a laser diode and a photodiode are microfabricated, and the integrated NV magnetometer is realized. The total light tripping cavity structure and system modulation photon collecting functional parts are designed by taking the diamond as the core, the sensitivity of the solid atom magnetometer can be maximized, and the size of the device is reduced.

Description

technical field [0001] The invention belongs to the field of solid-state atomic magnetometer and the field of micro-nano processing and manufacturing, and in particular relates to a diamond NV magnetometer integrating ODMR functional parts and a manufacturing process thereof. Background technique [0002] As the main physical quantity detection, magnetic detection technology has great research value in the fields of scientific research, engineering technology application, and biomedicine. Among the many magnetic detection technologies, diamond solid-state magnetic detection technology has the advantages of high precision, fast response time, compatible integration and expanded application. [0003] The diamond solid-state magnetometer mainly realizes the detection of the surrounding magnetic field information through the microwave modulation of the fluorescent signal radiated by the energy level transition of the NV color center. The NV color center in diamond is replaced b...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R33/02
CPCG01R33/02
Inventor 黄堃马宗敏程林曹丽琴傅月平郑斗斗
Owner ZHONGBEI UNIV
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