Integrated small nv color center solid-state magnetometer and its manufacturing process

Abstract

The invention belongs to the field of solid-state atomic magnetometers and the field of micro-nano processing and manufacturing, and especially discloses an integrated small-size NV color-center solid-state magnetometer and a manufacturing technology therefor. The method comprises the steps: carrying out the polymer packaging of a diamond block comprising an NV color center, and forming a resonantmicrocavity; integrating related functional devices of an ODMR test through the miniature assembly technology, including a laser diode, a microwave antenna and an interference cut-off filter. The integrated system enables the diamond and the microwave antenna to be integrated into the resonant cavity, and the laser diode is disposed at the top of the diamond and is used for directly generating laser with the length of 532nm so as to activate the NV color center in the diamond to generate fluorescent light. The system can achieve the better capturing of 532 laser, enables the laser to be totally reflected in the cavity for many times, enables the microwave antenna and the diamond to be wrapped in the cavity at the same time, and achieves the high-efficiency collection of laser fluorescentlight signals. The above system can achieve the high-sensitivity magnetic measurement.

Description

technical field [0001] The invention belongs to the field of solid-state atomic magnetometer and the field of micro-nano processing and manufacturing, and in particular relates to an integrated small NV color center solid-state magnetometer and a manufacturing process thereof. Background technique [0002] As an effective means to study the properties of matter and detect the unknown world, weak magnetic field measurement plays an important role in many research fields and has attracted more and more researchers' attention. The research on NV color center solid-state atomic magnetometer is a comprehensive multi-disciplinary interdisciplinary research topic integrating quantum technology, photoelectric information technology, precision micromachining, microwave technology, high-speed signal processing technology and computer information processing technology. After nearly a decade of development, atomic magnetometers have become the new generation of magnetometers that are mo...

AI Technical Summary

Problems solved by technology

[0005] The present invention aims to overcome the deficiencies of the prior art, solve the problems of large volume, low integration and complex manufacturing process of the magnetometer at the present stage, and provide an integrated small NV color center solid-state magnetometer and its manufacturing process. The present invention In order to improve the fluorescence efficiency of the NV color center magnetometer, the ODMR system with high-efficiency excitation of the NV color center, full fluorescence collection and high-efficiency microwave modulation is realized by using micro-nano processing technology and micro-assembly technology on the diamond substrate, and it is applied to the weak High-precision detection of magnetic signals

Images