Integrated small nv color center solid-state magnetometer and its manufacturing process
A magnetometer and color center technology, applied in the direction of the size/direction of the magnetic field, single equipment manufacturing, magnetic field measurement using magneto-optical equipment, etc., can solve complex manufacturing processes, low integration, large magnetometer volume, etc. problems, to achieve high magnetic measurement performance, reduce production process, and simplify the structure
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[0028] In order to make the purpose, features and advantages of the present invention understandable, the specific implementation manners of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0029] Such as figure 1 , figure 2 As shown, the integrated small NV color center solid-state magnetometer consists of a laser 1, a reflective film 2, a PDMS cavity 3, a microwave antenna 4, a diamond with an NV color center 5, a glass substrate 6, and an interference cut-off filter film system 7 and photodiode 8 these parts.
[0030] The laser 1 adopts a green laser diode, which is responsible for generating laser light with a wavelength of 532nm. The block diamond 5 with NV color center is wrapped by the PDMS cavity 3 and the interference cut-off filter film system 7 to form a diamond dielectric cavity to trap the 532nm green light generated by the laser diode. .
[0031] The loop microwave antenna 4 is wrapped in the PDMS cavity...
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