Functional terahertz slot nanometer antenna for detecting cell exosome without mark
A nano-antenna and exosome technology, which is applied in the field of terahertz measurement, can solve the problems that cannot meet the requirements, achieve the effect of facilitating the detection process of polarized THz spectrum and improving the absorption cross section
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[0038] Such as figure 1 As shown, the functionalized terahertz slit nano-antenna for label-free detection of cellular exosomes includes a substrate and a metal film 1 sputtered on its surface. The substrate includes double-polished high-resistance silicon 3 and formed by oxidation on its surface The silicon dioxide layer 2, the metal film 1 is provided with several groove structures with the silicon dioxide layer 2 as the bottom, and the bottom of the groove structure is oriented and coated with the aptamer 5 sequence, which is used to specifically bind to the surface of the exosomes 4 molecular.
[0039] The thickness of the double-polished high-resistance silicon 3 is 500 μm, and the resistivity is greater than 10000 Ω·cm. The thickness of the silicon dioxide layer 2 is 200 nm. The metal film 1 includes an upper layer and a lower layer, which are respectively a gold film and a chromium film, with thicknesses of 200 nm and 20 nm, respectively.
[0040] The shape of the groove st...
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