Cleaning method applicable to components with surface adhesion substance being Ceramic

A technology for attachments and parts, applied to the cleaning method using tools, cleaning methods using liquids, cleaning methods and utensils, etc., can solve problems such as poor quality, and achieve the effect of less damage to the workpiece

Active Publication Date: 2019-01-29
深圳仕上电子科技股份有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] In view of the above-mentioned shortcomings in the prior art that the attachments are Ceramic parts, the effect of removing impurities on the surface of the workpiece is not good. The present invention provides a cle

Method used

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Embodiment Construction

[0028] This embodiment is a preferred embodiment of the present invention, and other principles and basic structures that are the same as or similar to those of this embodiment fall within the protection scope of the present invention.

[0029] The present invention is mainly a cleaning method suitable for ceramic parts with surface attachments. The method includes the following steps:

[0030] S1. Chemical cleaning: In this embodiment, the workpiece is immersed in an aqueous ammonia and hydrogen peroxide solution. When soaking, the workpiece is subject to the hydrogen peroxide solution, which means that all the workpieces are immersed in the hydrogen peroxide solution. In this embodiment, the ammonia water is used The volume ratio of hydrogen peroxide solution is H 2 O 2 : H 2 O: NH 4 OH = (2.5-3.5): (3.5-4.5): (0.5-1.5) prepared, preferably, H 2 O 2 : H 2 O: NH 4 OH=3:4:1. In this embodiment, the water used is ultrapure water with a resistivity greater than or equal to 12MΩ.CM, th...

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Abstract

The invention discloses a cleaning method applicable to components with surface adhesion substance being Ceramic. The method comprises the following steps of 1, conducting chemical cleaning, wherein soaking treatment is conducted on a workpiece through an ammonium hydroxide and hydrogen peroxide solution, wherein the adopted ammonium hydroxide and hydrogen peroxide solution is prepared from H2O2,H2O and NH4OH according to the volume ratio of (2.5-3.5): (3.5-4.5): (0.5-1.5); 2, rinsing the workpiece through pure water; 3, conducting a neutralization reaction through nitric-fluoric acid, wherein the adopted nitric-fluoric acid is prepared from nitric acid and hydrofluoric acid, and the volume ratio of HNO3 to HF to H2O is (17-23): (0.5-1.5): (17-23); 4, conducting wiping; 5, soaking the workpiece in DIWater for 10 minutes or above at the normal temperature; 6, conducting a workpiece surface PH test; 7,conducting ultrasonic oscillation cleaning; 8, conducting a workpiece surface PH test;9, conducting CDA blowing; 10, conducting ultrasonic oscillation cleaning; 11, conducting heating and drying; and 12, conducting natural cooling.

Description

Technical field [0001] The invention discloses a cleaning method for ceramic parts, in particular to a cleaning method suitable for surface attachments of ceramic parts, and belongs to the technical field of special cleaning. Background technique [0002] The Insulator Ring in the AMAT eMax CT+ parts and the AMAT DPS parts: Ceramic Lid, GasInjector, Ion Port, Screw Cover Ring, etc., all of which are on the surface of Ceramic as surface attachments. After long-term use, the surface of the workpiece will inevitably be attached. Impurities, so regular cleaning has become an indispensable work for this kind of workpiece. The body of this kind of workpiece is ceramic and the surface is metal attachment (aluminum / photoresist). Conventional surface cleaning methods cannot remove the workpiece well. Impurities on the surface, the cleaning effect is not good. Summary of the invention [0003] In view of the above-mentioned disadvantage that the attachments in the prior art are ceramic par...

Claims

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Application Information

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IPC IPC(8): B08B3/08B08B3/12B08B3/02B08B1/00B08B13/00
CPCB08B1/006B08B3/02B08B3/08B08B3/12B08B13/00
Inventor 熊志红张远
Owner 深圳仕上电子科技股份有限公司
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